Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first film formation step of forming a first stacked body by sequentially stacking a first underlying film, a second underlying film, and a first protective film at the first surface, a first patterning step of patterning the first stacked body in a manner in which the first underlying film, the second underlying film, and the first protective film remain in a region of an element formation region other than a first groove formation region and a second groove formation region, the first underlying film and the second underlying film remain in the first groove formation region, and the first underlying film remains in the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first stacked body.

Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface that are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the first surface, the first protective film having a first opening overlapping a first groove formation region and a second opening overlapping a second groove formation region, in which a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film.

Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the quartz crystal substrate at the first surface where the vibrator is formed; and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film. R1>R2, in which R1 is a thickness of the first protective film in a first groove formation region of the quartz crystal substrate where the first groove is formed and R2 is a thickness of the first protective film in the second groove formation region where the second groove is formed.

Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as an element formation region, a region where the first groove is formed is referred to as a first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a second protective film formation step of forming, in the first groove formation region, a second protective film having a lower etching rate than the first protective film, a third protective film formation step of forming a third protective film in a region of the element formation region other than the first groove formation region and the second groove formation region, and a first dry etching st

Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a region of an element formation region other than a first groove formation region and a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film, a second protective film formation step of forming a second protective film in the first groove formation region, and a second dry etching step of dry etching the quartz crystal substrate

Abstract: [Problem] To provide a nuclear magnetic resonance diagnostic agent that has a lower toxicity to organisms and reduced side effects and yet has a site specificity toward a specific cell, tissue, organ, etc. [Solution] When ALA or an ALA derivative is administered in vivo, a metabolite thereof is accumulated in a specific cell, tissue, organ, etc. Focusing on this phenomenon, a nuclear magnetic resonance analysis was performed on a site wherein the metabolite of ALA that had been administered in vivo would be possibly accumulated. As a result, it was surprisingly found that ALA and an ALA derivative are useful as a diagnostic agent whereby the aforesaid problem can be solved.

Abstract: A thermoelectric material contains as a major ingredient a magnesium silicon alloy, a magnesium silicon tin alloy, a silicon or a silicon germanium alloy, and includes a porous body with a large number of pores.

Abstract: [Problem to be Solved] It is an object of the present invention to provide a composition, which induces immunity to tumor cells and is also able to induce inhibition of tumor growth. [Solution] Provided is a composition for inducing tumor immunity, comprising ALAs.

Abstract: [Problem] To provide a nuclear magnetic resonance diagnostic agent that has a lower toxicity to organisms and reduced side effects and yet has a site specificity toward a specific cell, tissue, organ, etc. [Solution] When ALA or an ALA derivative is administered in vivo, a metabolite thereof is accumulated in a specific cell, tissue, organ, etc. Focusing on this phenomenon, a nuclear magnetic resonance analysis was performed on a site wherein the metabolite of ALA that had been administered in vivo would be possibly accumulated. As a result, it was surprisingly found that ALA and an ALA derivative are useful as a diagnostic agent whereby the aforesaid problem can be solved.