Patents by Inventor Shigeru Sagami

Shigeru Sagami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation device
    Patent number: 5070275
    Abstract: An ion implantation device which is characterized in that source gas is supplied to an ion source from a gas cylinder provided in an external portion of the ion implantation device to maintain the cleanness of the clean room by reducing the frequency of exchanging gas cylinder for new one.
    Type: Grant
    Filed: June 19, 1990
    Date of Patent: December 3, 1991
    Assignee: Tokyo Electron Limited
    Inventors: Shigehito Ibuka, Hisashi Kondo, Shigeru Sagami, Koji Sumi