Patents by Inventor Shigeru Sankawa, Sr.

Shigeru Sankawa, Sr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon substrate having textured surface, and process for producing same
    Patent number: 9397242
    Abstract: The present invention addresses the problem of providing a novel silicon substrate having a textured surface by dry-etching the surface of a silicon substrate having (111) orientation and thereby forming a texture thereon. The present invention provides a silicon substrate having (111) orientation, said silicon substrate having a textured surface that includes multiple protrusions which each comprise three slant faces and have heights of 100 to 8000 nm. This process for producing a silicon substrate includes: a step of preparing a silicon substrate having (111) orientation; and a step of blowing an etching gas onto the surface of the silicon substrate, said etching gas containing one or more gases selected from the group consisting of ClF3, XeF2, BrF3, BrF5 and NF3.
    Type: Grant
    Filed: March 28, 2012
    Date of Patent: July 19, 2016
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Yasushi Taniguchi, Shigeru Sankawa, Sr., Kouji Arai, Hiroshi Tanabe, Ichiro Nakayama, Naoshi Yamaguchi