Patents by Inventor Shigetaka ITAKURA

Shigetaka ITAKURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wavefront measurement device and wavefront measurement system
    Patent number: 11067477
    Abstract: The wavefront measurement device performs: generating a first pupil function at a reference wavelength based on input data of a wavefront aberration; calculating a first image plane amplitude at a reference wavelength based on the first pupil function; generating a second pupil function at a multi-wavelength region; calculating a second image plane amplitude at the multi-wavelength region based on the second pupil function; correcting a measured point spread function using the first and second image plane amplitudes; applying a constraint condition using the corrected point spread function to the first image plane amplitude to correct the first image plane amplitude; generating a third pupil function based on the corrected first image plane amplitude; and calculating a wavefront aberration on a pupil plane based on the third pupil function.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: July 20, 2021
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masataka Suzuki, Takayuki Yanagisawa, Shigetaka Itakura, Takayasu Anada
  • WAVEFRONT MEASUREMENT DEVICE AND WAVEFRONT MEASUREMENT SYSTEM
    Publication number: 20200256761
    Abstract: The wavefront measurement device performs: generating a first pupil function at a reference wavelength based on input data of a wavefront aberration; calculating a first image plane amplitude at a reference wavelength based on the first pupil function; generating a second pupil function at a multi-wavelength region; calculating a second image plane amplitude at the multi-wavelength region based on the second pupil function; correcting a measured point spread function using the first and second image plane amplitudes; applying a constraint condition using the corrected point spread function to the first image plane amplitude to correct the first image plane amplitude; generating a third pupil function based on the corrected first image plane amplitude; and calculating a wavefront aberration on a pupil plane based on the third pupil function.
    Type: Application
    Filed: April 30, 2020
    Publication date: August 13, 2020
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masataka SUZUKI, Takayuki YANAGISAWA, Shigetaka ITAKURA, Takayasu ANADA