Patents by Inventor Shigetaka Mori

Shigetaka Mori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220367540
    Abstract: An imaging device according to an embodiment of the present disclosure includes: a first substrate; a second substrate; and a through wiring line. The first substrate includes a photoelectric conversion section and a first transistor in a first semiconductor substrate. The photoelectric conversion section and the first transistor are included in a sensor pixel. The second substrate is stacked on the first substrate and includes a second transistor and an opening that extends through a second semiconductor substrate. The second substrate has an adjuster on at least one of a side surface of the opening near a gate of the second transistor or a region of a surface opposed to the first transistor. The second transistor is included in the sensor pixel. The adjuster adjusts a threshold voltage of the second transistor. The through wiring line is in the opening and electrically couples the first substrate and the second substrate.
    Type: Application
    Filed: June 25, 2020
    Publication date: November 17, 2022
    Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Naoki SAKA, Shigetaka MORI, Shintaro OKAMOTO, Shinji NAKAGAWA
  • Publication number: 20220367539
    Abstract: An imaging device according to an embodiment of the present disclosure includes: a first substrate; a second substrate; a through wiring line; and an electrically conducive film. The first substrate includes a photoelectric conversion section and a first transistor in a first semiconductor substrate. The photoelectric conversion section and the first transistor are included in a sensor pixel. The second substrate is stacked on the first substrate and includes a second transistor and an opening in a second semiconductor substrate. The second transistor is included in the sensor pixel. The opening extends through the second semiconductor substrate in a stack direction. The through wiring line extends through the opening. The through wiring line electrically couples the first substrate and the second substrate. The electrically conducive film is provided at least between the second semiconductor substrate and the through wiring line. The electrically conducive film is coupled to a fixed potential.
    Type: Application
    Filed: June 25, 2020
    Publication date: November 17, 2022
    Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Shigetaka MORI, Hiroshi TAKAHASHI
  • Publication number: 20220367536
    Abstract: An imaging device according to an embodiment of the present disclosure includes: a first substrate including a sensor pixel that performs photoelectric conversion; a second substrate including a pixel circuit that outputs a pixel signal on a basis of electric charges outputted from the sensor pixel; and a third substrate including a processing circuit that performs signal processing on the pixel signal. The first substrate, the second substrate, and the third substrate are stacked in this order, and a concentration of electrically-conductive type impurities in a region on side of the first substrate is higher than a concentration of electrically-conductive type impurities in a region on side of the third substrate, in at least one or more semiconductor layers in which a field-effect transistor of the pixel circuit is provided.
    Type: Application
    Filed: June 25, 2020
    Publication date: November 17, 2022
    Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Naoki SAKA, Shintaro OKAMOTO, Yusuke KOHYAMA, Shigetaka MORI
  • Publication number: 20220271070
    Abstract: There is provided a solid-state imaging device including: a first semiconductor layer including a photoelectric converter and an electric charge accumulation section for each pixel, the electric charge accumulation section in which a signal electric charge generated in the photoelectric converter is accumulated; a pixel separation section that is provided in the first semiconductor layer, and partitions a plurality of the pixels from each other; a second semiconductor layer that is provided with a pixel transistor and is stacked on the first semiconductor layer, the pixel transistor that reads the signal electric charge of the electric charge accumulation section; and a first shared coupling section that is provided between the second semiconductor layer and the first semiconductor layer, and is provided to straddle the pixel separation section and is electrically coupled to a plurality of the electric charge accumulation sections.
    Type: Application
    Filed: June 26, 2020
    Publication date: August 25, 2022
    Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Keiichi NAKAZAWA, Koichiro ZAITSU, Nobutoshi FUJII, Yohei HIURA, Shigetaka MORI, Shintaro OKAMOTO, Keiji OHSHIMA, Shuji MANDA, Junpei YAMAMOTO, Yui YUGA, Shinichi MIYAKE, Tomoki KAMBE, Ryo OGATA, Tatsuki MIYAJI, Shinji NAKAGAWA, Hirofumi YAMASHITA, Yasushi HAMAMOTO, Naohiko KIMIZUKA
  • Publication number: 20210389362
    Abstract: An effect of PID is measured with higher accuracy by using an oscillation circuit. There is provided a semiconductor device including at least one measurement transistor a gate of which is electrically connected to an antenna unit that functions as an antenna in a plasma process, a selection transistor a source of which is electrically connected to the gate of the measurement transistor in parallel to the antenna unit; and an oscillation circuit electrically connected to a source of the measurement transistor and having an oscillation frequency that changes according to a threshold voltage of the measurement transistor.
    Type: Application
    Filed: October 16, 2019
    Publication date: December 16, 2021
    Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Shigetaka MORI, Manabu TOMITA
  • Patent number: 10788525
    Abstract: Provided is a semiconductor device, a measurement device, a measurement method, and a semiconductor system that enable accurate measurement of the plasma induced damage (PID) effect on a small scale. The semiconductor device includes an NMOSFET whose gate is connected to an antenna part that functions as an antenna in a plasma process and a PMOSFET that controls the connection between the NMOSFET and a ring oscillator. The semiconductor device is provided with a test element group (TEG) that includes an NMOSFET whose gate is connected to an antenna part that functions as an antenna in a plasma process and a PMOSFET that controls the connection between the NMOSFET and a ring oscillator.
    Type: Grant
    Filed: December 22, 2016
    Date of Patent: September 29, 2020
    Assignee: SONY CORPORATION
    Inventors: Yohei Hiura, Hidetoshi Oishi, Shigetaka Mori
  • Patent number: 10782330
    Abstract: The present disclosure relates to a semiconductor integrated circuit and a signal processing method that can improve measurement accuracy. Pulses subjected to pulse generation and disconnection control by a control circuit are supplied to a pulse distribution circuit and a CP circuit. The pulse distribution circuit divides one pulse into two or more pulses that do not overlap each other, and supplies the pulses to a CBCM circuit. The CBCM circuit is configured by connecting a capacitance element to be measured to the output of a measurement core circuit called a pseudo inverter. The CP circuit inputs, to the gate electrode, pulses that cause a channel of a non-measurement MISFET to change from the accumulation state to the inverted state, and monitors, from the substrate side, a CP current flowing through a trap acting as a recombination center of the gate insulating film and the semiconductor substrate interface.
    Type: Grant
    Filed: January 20, 2017
    Date of Patent: September 22, 2020
    Assignee: SONY CORPORATION
    Inventor: Shigetaka Mori
  • Patent number: 10629618
    Abstract: The present disclosure relates to a semiconductor device, an operation method of a semiconductor device, and a manufacturing method of a semiconductor device which are capable of minimizing influence of a gate length variation on a circuit characteristic and increasing a good product ratio (yield) in a product sorting test. A ring oscillator configured such that the plurality of inverters is connected in a ring-like form, and gate capacitors of the transistors are connected to respective output terminals of the plurality of inverters as a load capacitor outputs an oscillating signal, the ring oscillator is configured with a plurality of transistors having the same gate length, and at least two or more ring oscillators including a plurality of transistors having different gate lengths are configured.
    Type: Grant
    Filed: September 8, 2017
    Date of Patent: April 21, 2020
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Shigetaka Mori
  • Publication number: 20190214408
    Abstract: The present disclosure relates to a semiconductor device, an operation method of a semiconductor device, and a manufacturing method of a semiconductor device which are capable of minimizing influence of a gate length variation on a circuit characteristic and increasing a good product ratio (yield) in a product sorting test. A ring oscillator configured such that the plurality of inverters is connected in a ring-like form, and gate capacitors of the transistors are connected to respective output terminals of the plurality of inverters as a load capacitor outputs an oscillating signal, the ring oscillator is configured with a plurality of transistors having the same gate length, and at least two or more ring oscillators including a plurality of transistors having different gate lengths are configured.
    Type: Application
    Filed: September 8, 2017
    Publication date: July 11, 2019
    Inventor: SHIGETAKA MORI
  • Publication number: 20190049498
    Abstract: The present disclosure relates to a semiconductor integrated circuit and a signal processing method that can improve measurement accuracy. Pulses subjected to pulse generation and disconnection control by a control circuit are supplied to a pulse distribution circuit and a CP circuit. The pulse distribution circuit divides one pulse into two or more pulses that do not overlap each other, and supplies the pulses to a CBCM circuit. The CBCM circuit is configured by connecting a capacitance element to be measured to the output of a measurement core circuit called a pseudo inverter. The CP circuit inputs, to the gate electrode, pulses that cause a channel of a non-measurement MISFET to change from the accumulation state to the inverted state, and monitors, from the substrate side, a CP current flowing through a trap acting as a recombination center of the gate insulating film and the semiconductor substrate interface.
    Type: Application
    Filed: January 20, 2017
    Publication date: February 14, 2019
    Inventor: SHIGETAKA MORI
  • Publication number: 20190004101
    Abstract: The present disclosure relates to a semiconductor device, a measurement device, a measurement method, and a semiconductor system that enable accurate measurement of the plasma induced damage (PID) effect on a small scale. The semiconductor device includes: an NMOSFET whose gate is connected to an antenna part that functions as an antenna in a plasma process; and a PMOSFET that controls the connection between the NMOSFET and a ring oscillator. For example, the present disclosure can be applied to a semiconductor device or the like provided with a test element group (TEG) including: an NMOSFET whose gate is connected to an antenna part that functions as an antenna in a plasma process; and a PMOSFET that controls the connection between the NMOSFET and a ring oscillator.
    Type: Application
    Filed: December 22, 2016
    Publication date: January 3, 2019
    Inventors: YOHEI HIURA, HIDETOSHI OISHI, SHIGETAKA MORI
  • Patent number: 9917091
    Abstract: A method of manufacturing a semiconductor device, includes: forming an insulating film on a first surface of a semiconductor substrate; and forming a hydrogen supply film on a second surface facing the first surface of the semiconductor substrate, the hydrogen supply film containing one or more of silicon oxide, TEOS, BPSG, BSG, PSG, FSG, carbon-containing silicon oxide, silicon nitride, carbon-containing silicon nitride, and oxygen-containing silicon carbide.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: March 13, 2018
    Assignee: SONY CORPORATION
    Inventors: Katsuhisa Kugimiya, Kenichi Murata, Hitoshi Okano, Shigetaka Mori, Hiroyuki Kawashima, Takuma Matsuno
  • Publication number: 20170207223
    Abstract: A method of manufacturing a semiconductor device, includes: forming an insulating film on a first surface of a semiconductor substrate; and forming a hydrogen supply film on a second surface facing the first surface of the semiconductor substrate, the hydrogen supply film containing one or more of silicon oxide, TEOS, BPSG, BSG, PSG, FSG, carbon-containing silicon oxide, silicon nitride, carbon-containing silicon nitride, and oxygen-containing silicon carbide.
    Type: Application
    Filed: May 28, 2015
    Publication date: July 20, 2017
    Inventors: KATSUHISA KUGIMIYA, KENICHI MURATA, HITOSHI OKANO, SHIGETAKA MORI, HIROYUKI KAWASHIMA, TAKUMA MATSUNO
  • Patent number: 4847103
    Abstract: The present invention relates to a process for producing gelatinized grain for food or food processing material without steaming or boiling. The present invention comprises adjusting the water content of the grain before puffing to 40% or less, puffing the grain at 100.degree. C., further adding water to the puffed grain, and then coarsely pulverizing the grain, thereby producing coarsely pulverized porous grain. According to the present invention, the coarsely pulverized porous grain having a good crispness as well as a homogeneous water absorption and easy handling, can be obtained.
    Type: Grant
    Filed: March 6, 1987
    Date of Patent: July 11, 1989
    Assignees: Eiichi Saita, Nippon Scitec Co., Ltd.
    Inventors: Eiichi Saita, Shigetaka Mori, Akihiko Mori