Patents by Inventor Shigeto Ami

Shigeto Ami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • X-ray mask provided with an alignment mark and method of manufacturing the same
    Patent number: 6212252
    Abstract: An X-ray mask which is provided with an alignment mark and a transfer circuit pattern having a high position accuracy can be manufactured through a simplified manufacturing process. A membrane allowing passage of X-rays is formed on a substrate. A X-ray absorber intercepting transmission of X-rays is formed on the membrane. The substrate includes a window exposing the membrane. The X-ray absorber includes a transfer circuit pattern and an alignment mark formed in a region not overlapping with the window in a plan view.
    Type: Grant
    Filed: October 23, 1998
    Date of Patent: April 3, 2001
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Koji Kise, Hideki Yabe, Sunao Aya, Kaeko Kitamura, Kenji Marumoto, Shigeto Ami