Patents by Inventor Shigeto Yotuya

Shigeto Yotuya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process of making a tuning fork type crystal component
    Patent number: 7716807
    Abstract: A manufacturing method produces an angular velocity sensor element easily with a high degree of accuracy. The manufacturing method includes forming a number of tuning fork shaped crystal elements on a single crystal wafer by a photo-etching technique, the crystal elements having protrusion ridge line sections in the lengthwise direction of +X faces of the crystal, caused by etching anisotropy. A step is included for forming a metallic film on each side face including both principal planes and said +X face of said tuning fork shaped crystal element of the single crystal wafer. The method also includes dividing the metallic film of the +X face along the protrusion ridge line section and forming first and second sensor electrodes.
    Type: Grant
    Filed: July 5, 2006
    Date of Patent: May 18, 2010
    Assignee: Nihon Dempa Kogyo Co., Ltd.
    Inventors: Hideryo Matsudo, Shigeto Yotuya, Jun Katase, Takahiro Ohtsuka
  • Tuning fork type crystal component for angular velocity sensor and manufacturing method thereof
    Publication number: 20060250051
    Abstract: The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm.
    Type: Application
    Filed: July 5, 2006
    Publication date: November 9, 2006
    Inventors: Hideryo Matsudo, Shigeto Yotuya, Jun Katase, Takahiro Ohtsuka
  • Tuning fork type crystal component for angular velocity sensor and manufacturing method thereof
    Patent number: 7075218
    Abstract: The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm.
    Type: Grant
    Filed: October 6, 2004
    Date of Patent: July 11, 2006
    Assignee: Nihon Dempa Kogyo Co., Ltd.
    Inventors: Hideryo Matsudo, Shigeto Yotuya, Jun Katase, Takahiro Ohtsuka
  • Tuning fork type crystal component for angular velocity sensor and manufacturing method thereof
    Publication number: 20050122006
    Abstract: The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm.
    Type: Application
    Filed: October 6, 2004
    Publication date: June 9, 2005
    Inventors: Hideryo Matsudo, Shigeto Yotuya, Jun Katase, Takahiro Ohtsuka