Abstract: This invention provides an EDS detector in which even if connecting pipes vibrate due to gas flow, such vibration will not be transferred to a cryostat side and in which a small-sized gas-circulation-type refrigerator is provided in the cryostat sliding in a given direction, helium gas is supplied through the connecting pipes to the refrigerator, and an x-ray detecting element is cooled by means of the refrigerator. In connecting pipes, a connecting pipe body portion is connected to a pressure-converting value unit which is fixedly held in a vibration-proofing stand. Additionally, weights can be selectively applied to a flexible connecting pipe to further dampen vibrations.

Abstract: An energy dispersive X-ray detector assembly has a detector element of a high-purity silicon substrate with a pair of electrodes, one on either side of the silicon substrate, to create an depletion layer in the silicon substrate when an electric field is created between the electrodes to enable the detection of X-rays. The silicon substrate has a resistivity of at least 10 k.OMEGA..multidot.cm and a thickness in the incident direction of the X-rays of approximately 3 to 5 mm. A refrigerator system, such as a closed cycle gas circulation refrigerator, can be used to cool the detector element to enable the provision of a compact detector assembly.