Abstract: A tubephragm pump includes a tubephragm that has a pump head portion that forms a pump chamber, a driving head that holds the tubephragm and expands and contracts the pump chamber by directly pressing and pulling the pump head portion in a direction intersecting with a transfer direction of a transfer fluid, a driving unit that drives the driving head back and forth in a driving direction to expand and contract the pump chamber, and a control unit that controls the driving unit. The tubephragm is in a flat shape with a cross-sectional shape intersecting with the transfer direction of the transfer fluid of the pump chamber having a length in a direction intersecting with the driving direction longer than a length in the driving direction. A pair of liquid contacting surfaces opposing in the driving direction of the pump chamber move while maintaining a parallel state.

Abstract: A tubephragm pump includes a tubephragm that has a pump head portion that forms a pump chamber, a driving head that holds the tubephragm and expands and contracts the pump chamber by directly pressing and pulling the pump head portion in a direction intersecting with a transfer direction of a transfer fluid, a driving unit that drives the driving head back and forth in a driving direction to expand and contract the pump chamber, and a control unit that controls the driving unit. The tubephragm is in a flat shape with a cross-sectional shape intersecting with the transfer direction of the transfer fluid of the pump chamber having a length in a direction intersecting with the driving direction longer than a length in the driving direction. A pair of liquid contacting surfaces opposing in the driving direction of the pump chamber move while maintaining a parallel state.

Abstract: A reciprocating pump includes: a pump head having an inner space; a diaphragm configured to partition the inner space of the pump head into a pump chamber into which a transfer fluid is to be introduced and a working chamber into which working air is to be introduced; a driving device including a reciprocating member coupled to the diaphragm, the driving device being capable of driving the reciprocating member with the working air at least in a direction that the diaphragm is retracted; and a working air switching device.