Abstract: There is obtained a vacuum pump which suppresses an influence on external piping caused by a contact failure of a rotor during rotation of the rotor. A temperature rise ring 301 is provided in the vacuum pump, an outlet port 133 to which the external piping is connected is connected to the temperature rise ring 301, and a rotational force is directly or indirectly applied to the temperature rise ring 301 due to the contact failure of the rotor during the rotation of the rotor. In addition, a rotation suppression means (a hole 301a and a bolt 305) for suppressing rotation of the temperature rise ring 301 by the above-described rotational force is provided separately from a connection portion between the temperature rise ring 301 and a casing (outer tube 127a).

Abstract: A vacuum pump includes a casing having an inlet port, and enclosing a rotating body, a thread groove stator which is substantially cylindrical and is disposed on an outer periphery of the rotating body, and a thread groove which is formed in at least one of an outer peripheral surface of the rotating body and an inner peripheral surface of the thread groove stator, the vacuum pump exhausting gas sacked from a side of the inlet port to outside of the casing by rotating the rotating body, wherein a binding means, which is formed of a material having a linear expansion coefficient lower than a linear expansion coefficient of a material of the thread groove stator and reduces radial deformation at a time of thermal expansion of the thread groove stator, is disposed on an outer periphery of the thread groove stator.

Abstract: A vacuum pump and a piping structural portion for a vacuum pump are provided that limit damage to a component connected to external piping and limit gas leakage even when the vacuum pump is displaced in a rotation direction due to damage to the vacuum pump. The vacuum pump draws in gas through an inlet port by rotation of a rotor and includes a casing, which rotatably houses the rotor, and a piping structural portion disposed in the casing. At least a part of the piping structural portion includes an elastic portion that is configured to elastically deform to absorb a displacement.