Abstract: A hand for an industrial robot allowing use thereof in different ways for different applications while reducing manufacturing costs and an industrial robot including the hand are provided. A hand includes a support portion configured to support either a suction wafer mounting portion or a grip wafer mounting portion, and the support portion includes an air flow path connected to a suction hole in a state where the support portion supports the suction wafer mounting portion and one of a suction unit including a connecting member that connects a tip end of an air pipe to the air flow path and a grip unit that can press an end surface of a wafer in a state where the support portion supports the grip wafer mounting portion, and further includes an attachment portion used for attaching the other one of the suction unit and the grip unit.

Abstract: An industrial robot for use with an object may include a hand on which the object is mounted; an arm having a distal end to which the hand is rotatably connected; a body part to which a base end of the arm is rotatably connected; and an installation member structured to install the body part on a floor surface. The body part may include an elevating body having an upper surface to which the base end of the arm is rotatably connected, a casing configured to hold the elevating body such that the elevating body is movable up and down and to accommodate at least a part of a lower end of the elevating body, and an elevating mechanism configured to move the elevating body up and down. The elevating mechanism may be accommodated in the casing so as to overlap the elevating body when viewed in an up-down direction.

Abstract: An industrial robot may include a plurality of hands structured to mount the transfer objects; an arm comprising a front end side and a base end side, the hands being rotatably joined with the front end side of the arm; and a main body portion to which the base end side of the arm is rotatably joined. The main body portion may include an elevating unit to which the base end side of the arm is rotatably joined on a top surface side thereof, a housing which holds the elevating unit to be raised/lowered and in which at least part of a bottom end of the elevating unit is housed, and an elevating mechanism structured to raise and lower the elevating unit. The elevating mechanism may be accommodated in the housing so as to align with the elevating unit when viewed from a top-bottom direction.

Abstract: An industrial robot may include a first hand and a second hand, each of which is provided with a first hand portion including a substrate-mounting portion and a second hand portion having multiple substrate-mounting portions; a first arm rotatably joined to the first and second hand portion; a second arm rotatably joined to the first and second hand portion; an arm support portion; a column portion for holding said arm support portion; a first hand portion-rotating mechanism; a second hand portion-rotating mechanism; third hand portion-rotating mechanism; a fourth hand portion-rotating mechanism; a first arm-rotating mechanism structured to rotate said first arm with respect to said arm support portion; and a second arm-rotating mechanism structured to rotate said second arm with respect to said arm support portion.

Abstract: The present application provides a workpiece transfer system in which a production efficiency of a production line to be used can be improved. For example, a workpiece transfer system 1 includes: robots 11 & 12 placed in front of process modules 4 & 6 for conducting a predetermined processing operation on a workpiece W, the robots 11 & 12 bringing the workpiece W into the process modules 4 & 6 and taking the workpiece W out of the process modules 4 & 6; a workpiece storage unit 13 for storing the workpiece W to be brought into the process modules 4 & 6 and the workpiece W taken out of the process modules 4 & 6; and a transfer mechanism 14 for transferring the workpiece storage unit 13 in a direction almost perpendicular to a direction of bringing in and taking out the workpiece W for the process modules 4 & 6.

Abstract: An industrial robot may include a plurality of hands structured to mount the transfer objects; an arm comprising a front end side and a base end side, the hands being rotatably joined with the front end side of the arm; and a main body portion to which the base end side of the arm is rotatably joined. The main body portion may include an elevating unit to which the base end side of the arm is rotatably joined on a top surface side thereof, a housing which holds the elevating unit to be raised/lowered and in which at least part of a bottom end of the elevating unit is housed, and an elevating mechanism structured to raise and lower the elevating unit. The elevating mechanism may be accommodated in the housing so as to align with the elevating unit when viewed from a top-bottom direction.

Abstract: The present application provides a workpiece transfer system in which a production efficiency of a production line to be used can be improved. For example, a workpiece transfer system 1 includes: robots 11 & 12 placed in front of process modules 4 & 6 for conducting a predetermined processing operation on a workpiece W, the robots 11 & 12 bringing the workpiece W into the process modules 4 & 6 and taking the workpiece W out of the process modules 4 & 6; a workpiece storage unit 13 for storing the workpiece W to be brought into the process modules 4 & 6 and the workpiece W taken out of the process modules 4 & 6; and a transfer mechanism 14 for transferring the workpiece storage unit 13 in a direction almost perpendicular to a direction of bringing in and taking out the workpiece W for the process modules 4 & 6.

Abstract: The present application provides a workpiece transfer system in which a production efficiency of a production line to be used can be improved. For example, a workpiece transfer system 1 includes: robots 11 & 12 placed in front of process modules 4 & 6 for conducting a predetermined processing operation on a workpiece W, the robots 11 & 12 bringing the workpiece W into the process modules 4 & 6 and taking the workpiece W out of the process modules 4 & 6; a workpiece storage unit 13 for storing the workpiece W to be brought into the process modules 4 & 6 and the workpiece W taken out of the process modules 4 & 6; and a transfer mechanism 14 for transferring the workpiece storage unit 13 in a direction almost perpendicular to a direction of bringing in and taking out the workpiece W for the process modules 4 & 6.

Abstract: An industrial robot may include a first hand and a second hand, each of which is provided with a first hand portion including a substrate-mounting portion and a second hand portion having multiple substrate-mounting portions; a first arm rotatably joined to the first and second hand portion; a second arm rotatably joined to the first and second hand portion; an arm support portion; a column portion for holding said arm support portion; a first hand portion-rotating mechanism; a second hand portion-rotating mechanism; third hand portion-rotating mechanism; a fourth hand portion-rotating mechanism; a first arm-rotating mechanism structured to rotate said first arm with respect to said arm support portion; and a second arm-rotating mechanism structured to rotate said second arm with respect to said arm support portion.

Abstract: A rotating mechanism which returning a rotating body to an original position. The first detecting mechanism for detecting that the rotating body is in the original position is provided with a first section-to-be-detected affixed to the rotating body and the first detecting section affixed to a supporting body. A second detecting mechanism is provided with a swing member attached to the supporting body, an engaging member that lets the swing member swing, a second section-to-be-detected affixed to the swing member, and a second detecting section affixed to the supporting body. The first detecting section detects the first section-to-be-detected at one or two positions, and the second detecting section switches between ON and OFF at one position. The rotating body is first rotated to the position at which the second detecting section switches between ON and OFF, in order to return the rotating body to its original position.

Abstract: An industrial robot may include a main body section, a first arm, a second arm, a third arm, a first speed reducer which connects the main body section and the first arm, a second speed reducer which connects the first arm and the second arm, and a connecting mechanism which connects the input shaft of the first speed reducer and the input shaft of the second speed reducer, and a second drive motor which drives the third arm. The speed reduction ratio of the first and second speed reducer are set such that the movement loci of a third articulation section which connects the second and third arm are rectilinear. The connecting mechanism connects the input shafts at a predetermined speed ratio. The second drive motor is mounted on the second arm closer to the tip than where a third articulation section is located.

Abstract: A rotating mechanism which returning a rotating body to an original position. The first detecting mechanism for detecting that the rotating body is in the original position is provided with a first section-to-be-detected affixed to the rotating body and the first detecting section affixed to a supporting body. A second detecting mechanism is provided with a swing member attached to the supporting body, an engaging member that lets the swing member swing, a second section-to-be-detected affixed to the swing member, and a second detecting section affixed to the supporting body. The first detecting section detects the first section-to-be-detected at one or two positions, and the second detecting section switches between ON and OFF at one position. The rotating body is first rotated to the position at which the second detecting section switches between ON and OFF, in order to return the rotating body to its original position.

Abstract: A rotating range restricting mechanism that restricts the rotating range of a rotating body rotatable 360 degrees or more with respect to a supporting body includes: a swing member rotatably attached to the supporting body; a first restricting member abutting the swing member to restrict the swing range of one end of the swing member; a second restricting member abutting the swing member to restrict the swing range of the other end of the swing member; an engaging member fixed to the rotating body which engages with the swing member to allow the swing member to swing between a first restricting position and a second restricting position; a first magnetic holding mechanism that holds the swing member in the first restricting position with a magnetic attraction force; and a second magnetic holding mechanism that holds the swing member in the second restricting position with a magnetic attraction force.

Abstract: The present application provides a workpiece transfer system in which a production efficiency of a production line to be used can be improved. For example, a workpiece transfer system 1 includes: robots 11 & 12 placed in front of process modules 4 & 6 for conducting a predetermined processing operation on a workpiece W, the robots 11 & 12 bringing the workpiece W into the process modules 4 & 6 and taking the workpiece W out of the process modules 4 & 6; a workpiece storage unit 13 for storing the workpiece W to be brought into the process modules 4 & 6 and the workpiece W taken out of the process modules 4 & 6; and a transfer mechanism 14 for transferring the workpiece storage unit 13 in a direction almost perpendicular to a direction of bringing in and taking out the workpiece W for the process modules 4 & 6.

Abstract: An industrial robot may include a main body section, a first arm, a second arm, a third arm, a first speed reducer which connects the main body section and the first arm a second speed reducer which connects the first arm and the second arm, and a connecting mechanism which connects the input shaft of the first speed reducer and the input shaft of the second speed reducer, and a second drive motor which drives the third arm. The speed reduction ratio of the first and second speed reducer are set such that the movement loci of a third articulation section which connects the second and third arm are rectilinear. The connecting mechanism connects the input shafts predetermined speed ratio. The second drive motor is mounted on the second arm closer to the tip than where a third articulation section is located.

Abstract: A workpiece transfer system may include a plurality of cassettes for storing workpieces, at least one workpiece processing apparatus, and a multi-joint industrial robot for loading and unloading workpieces to/from the cassettes. The multi-joint industrial robot may include a hand part for holding a workpiece, an arm part supporting the hand part so as to make the hand part rotatable, and a link mechanism that supports an arm joint part, positioned at a base side of the arm part, so as to make the arm joint part rotatable.

Abstract: A multi-joint robot for loading/unloading a work into/from a cassette, which includes a hand part holding the work, an arm part rotatably holding the hand part, a link mechanism rotatably holding the base end side of the arm part and moving so that the moving route of the base end side of the arm part becomes linear in a direction roughly orthogonal to a direction for loading/unloading the work, and a driving device for moving the tip side of the arm part so as to linearly interpolate it in a direction for loading/unloading the work according to the movement of the link mechanism.

Abstract: A workpiece transfer system may include a plurality of cassettes for storing workpieces, at least one workpiece processing apparatus, and a multi-joint industrial robot for loading and unloading workpieces to/from the cassettes. The multi-joint industrial robot may include a hand part for holding a workpiece, an arm part supporting the hand part so as to make the hand part rotatable, and a link mechanism that supports an arm joint part, positioned at a base side of the arm part, so as to make the arm joint part rotatable.

Abstract: An multi-joint robot (1) for loading/unloading a work (30) into/from a cassette, characterized by comprising a hand part (7) holding the work (30), an arm part (6) rotatably holding the hand part (7), a link mechanism (3) rotatably holding the base end side of the arm part (6) and moving so that the moving route of the base end side of the arm part (6) becomes linear in a direction roughly orthogonal to a direction for loading/unloading the work (30), and a driving means for moving the tip side of the arm part (6) so as to linearly interpolate it in a direction for loading/unloading the work (30) according to the movement of the link mechanism (3).