Patents by Inventor Shih-Che (Jeff) Lin

Shih-Che (Jeff) Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of annealing an oxide film
    Publication number: 20030124873
    Abstract: The present invention is a method of annealing an oxide film. According to the present invention, an oxide film is deposited over a substrate. The oxide film is then annealed by exposing the oxide film to an ambient containing atomic oxygen for a predetermined period of time. In an embodiment of the present invention, the ambient containing atomic oxygen (O) is formed in the chamber by reacting a hydrogen containing gas and an oxygen containing gas together. In another embodiment of the present invention, the ambient containing atomic oxygen (O) is formed by decomposing N2O.
    Type: Application
    Filed: December 28, 2001
    Publication date: July 3, 2003
    Inventors: Guangcai Xing, Lee Luo, Aihua (Steven) Chen, Errol Antonio C. Sanchez, Christopher G. Quentin, Kuan-Ting (James) Lin, Shih-Che (Jeff) Lin