Abstract: A method includes following steps. A photoresist-coated substrate is received to an extreme ultraviolet (EUV) tool. An EUV radiation is directed from a radiation source onto the photoresist-coated substrate, wherein the EUV radiation is generated by an excitation laser hitting a plurality of target droplets ejected from a first droplet generator. The first droplet generator is replaced with a second droplet generator at a temperature not lower than about 150° C.

Abstract: A storage system and a method thereof. The storage system comprises first and second storage devices, first and second analog front ends, and a controller. The first and second analog front ends, coupled to the first and second storage devices, receive first and second analog data from the first and second drive devices for conversion to first and second digital data. The controller, coupled to the first and second analog front ends, comprises a signal processor and a common memory. The signal processor receives the first and second digital data to perform first and second digital signal processing and access the common memory. The common memory is coupled to the signal processor to be accessed thereby.

Abstract: Apparatus for playing and managing multimedia items include a primary storage, a browser and a converter. The converter is used for converting multimedia items from a first item type to a second item type. The browser provides a unified operating interface for accessing multimedia items of both the first item type and the second item type. By dynamically converting the item type of the multimedia items on the primary storage, a better user experience is provided even the capacity of the primary storage is limited.