Patents by Inventor Shih-Kai FAN

Shih-Kai FAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230213457
    Abstract: An automated optical double-sided inspection apparatus includes a first image-capturing portion, a second image-capturing portion, a platform, a first light-blocking portion, a second light-blocking portion, and a processing portion. The platform carries an external object. When the processing portion operates in a first capturing mode, the second light-blocking portion blocks visible light from passing therethrough, while the first light-blocking portion allows visible light to pass therethrough, so that the first image-capturing portion shoots a first side of the external object through the first light-blocking portion to obtain a first image.
    Type: Application
    Filed: December 21, 2022
    Publication date: July 6, 2023
    Inventors: Yee Siang GAN, Sze-Teng LIONG, Shih-Kai FAN, Che-Ming LI, Yu-Hsien LIN
  • Publication number: 20230210102
    Abstract: An intelligent Forcipomyia taiwana monitoring and management system comprises: a catching mechanism grabbing a to-be-identified target; a database storing a datum comprising pictures of a flying insect category; a model training module using the pictures to establish a training model; an image capture module shooting an image including the target; an identifying module selecting a first segmented region including the target by using YOLO detection framework technology, extracting a first identification feature from the target, and inputting the feature into the training model for deep learning to identify a flying insect category to which the target belongs and produce an identification result; a counting module recording a number of the target into the database; and a predictive tracking module obtaining a marked object based on the result marked with the target identified in the image, and using a Monte-Carlo category algorithm to track and predict the object.
    Type: Application
    Filed: December 21, 2022
    Publication date: July 6, 2023
    Inventors: Yee Siang GAN, Shih-Kai FAN, Ching-Yun TSENG, Sze-Teng LIONG, Yu-Ting SHENG
  • Patent number: 11094579
    Abstract: A method of forming a semiconductor structure includes depositing a mask layer over a substrate. The method includes etching the substrate to define a first opening. The method includes depositing a sacrificial material in the first opening. The method includes depositing a dielectric liner along sidewalls of the first opening, wherein a bottom surface of the dielectric liner contacts the sacrificial material. The method includes removing the sacrificial material. The method includes etching the substrate to enlarge the first opening to define a second opening. The second opening includes a first portion extending a first depth from the dielectric material in a first direction perpendicular to a top surface of the substrate, and a second portion extending in a second direction, parallel to the top surface of the substrate. The method includes removing the dielectric liner. The method includes filling the second opening with a dielectric material.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: August 17, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Bin Huang, Chien-Mao Chen, Yu-Hsuan Kuo, Shih-Kai Fan, Chia-Hung Lai, Kang-Min Kuo
  • Publication number: 20200286774
    Abstract: A method of forming a semiconductor structure includes depositing a mask layer over a substrate. The method includes etching the substrate to define a first opening. The method includes depositing a sacrificial material in the first opening. The method includes depositing a dielectric liner along sidewalls of the first opening, wherein a bottom surface of the dielectric liner contacts the sacrificial material. The method includes removing the sacrificial material. The method includes etching the substrate to enlarge the first opening to define a second opening. The second opening includes a first portion extending a first depth from the dielectric material in a first direction perpendicular to a top surface of the substrate, and a second portion extending in a second direction, parallel to the top surface of the substrate. The method includes removing the dielectric liner. The method includes filling the second opening with a dielectric material.
    Type: Application
    Filed: May 26, 2020
    Publication date: September 10, 2020
    Inventors: Yen-Bin HUANG, Chien-Mao CHEN, Yu-Hsuan KUO, Shih-Kai FAN, Chia-Hung LAI, Kang-Min KUO
  • Patent number: 10699938
    Abstract: A semiconductor structure includes a shallow trench isolation (STI) structure. The semiconductor structure includes a substrate having a first surface. A STI structure extends from the first surface into the substrate. The STI structure includes a first portion and a second portion. The first portion extends from the first surface into the substrate, and has an intersection with the first surface. The second portion extends away from the first portion, and has a tip at a distance away from the intersection in a direction parallel to the first surface. The first portion and the second portion are filled with a dielectric material.
    Type: Grant
    Filed: July 18, 2013
    Date of Patent: June 30, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Bin Huang, Chien-Mao Chen, Yu-Hsuan Kuo, Shih-Kai Fan, Chia-Hung Lai, Kang-Min Kuo
  • Patent number: 10008494
    Abstract: A semiconductor component, which includes a substrate, an interfacial layer disposed on the substrate, a first metal gate structure and a second metal gate structure disposed on the substrate. The first metal gate structure includes a first high-k dielectric layer disposed on the interfacial layer, and a first metal gate layer disposed on the first high-k dielectric layer. The second metal gate structure includes a second high-k dielectric layer disposed on the interfacial layer, a third high-k dielectric layer disposed on the second high-k dielectric layer, and a second metal gate layer disposed on the third high-k dielectric layer.
    Type: Grant
    Filed: January 11, 2017
    Date of Patent: June 26, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Chieh Lai, Kuang-Hsin Chen, Shih-Kai Fan, Yung-Hsien Wu, Yu-Hsun Chen
  • Publication number: 20170125417
    Abstract: A semiconductor component, which includes a substrate, an interfacial layer disposed on the substrate, a first metal gate structure and a second metal gate structure disposed on the substrate. The first metal gate structure includes a first high-k dielectric layer disposed on the interfacial layer, and a first metal gate layer disposed on the first high-k dielectric layer. The second metal gate structure includes a second high-k dielectric layer disposed on the interfacial layer, a third high-k dielectric layer disposed on the second high-k dielectric layer, and a second metal gate layer disposed on the third high-k dielectric layer.
    Type: Application
    Filed: January 11, 2017
    Publication date: May 4, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Chieh LAI, Kuang-Hsin CHEN, Shih-Kai FAN, Yung-Hsien WU, Yu-Hsun CHEN
  • Patent number: 9570568
    Abstract: A semiconductor component, which includes a substrate, an interfacial layer disposed on the substrate, a first metal gate structure and a second metal gate structure disposed on the substrate. The first metal gate structure includes a first high-k dielectric layer disposed on the interfacial layer, and a first metal gate layer disposed on the first high-k dielectric layer. The second metal gate structure includes a second high-k dielectric layer disposed on the interfacial layer, a third high-k dielectric layer disposed on the second high-k dielectric layer, and a second metal gate layer disposed on the third high-k dielectric layer.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: February 14, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Chieh Lai, Kuang-Hsin Chen, Shih-Kai Fan, Yung-Hsien Wu, Yu-Hsun Chen
  • Publication number: 20160351673
    Abstract: A semiconductor component, which includes a substrate, an interfacial layer disposed on the substrate, a first metal gate structure and a second metal gate structure disposed on the substrate. The first metal gate structure includes a first high-k dielectric layer disposed on the interfacial layer, and a first metal gate layer disposed on the first high-k dielectric layer. The second metal gate structure includes a second high-k dielectric layer disposed on the interfacial layer, a third high-k dielectric layer disposed on the second high-k dielectric layer, and a second metal gate layer disposed on the third high-k dielectric layer.
    Type: Application
    Filed: May 28, 2015
    Publication date: December 1, 2016
    Inventors: Cheng-Chieh LAI, Kuang-Hsin CHEN, Shih-Kai FAN, Yung-Hsien WU, Yu-Hsun CHEN
  • Publication number: 20150021700
    Abstract: A semiconductor structure includes a shallow trench isolation (STI) structure. The semiconductor structure includes a substrate having a first surface. A STI structure extends from the first surface into the substrate. The STI structure includes a first portion and a second portion. The first portion extends from the first surface into the substrate, and has an intersection with the first surface. The second portion extends away from the first portion, and has a tip at a distance away from the intersection in a direction parallel to the first surface. The first portion and the second portion are filled with a dielectric material.
    Type: Application
    Filed: July 18, 2013
    Publication date: January 22, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Bin HUANG, Chien-Mao CHEN, Yu-Hsuan KUO, Shih-Kai FAN, Chia-Hung LAI, Kang-Min KUO