Patents by Inventor Shih-Ming Pan

Shih-Ming Pan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240120388
    Abstract: Provided are structures and methods for forming structures with sloping surfaces of a desired profile. An exemplary method includes performing a first etch process to differentially etch a gate material to a recessed surface, wherein the recessed surface includes a first horn at a first edge, a second horn at a second edge, and a valley located between the first horn and the second horn; depositing an etch-retarding layer over the recessed surface, wherein the etch-retarding layer has a central region over the valley and has edge regions over the horns, and wherein the central region of the etch-retarding layer is thicker than the edge regions of the etch-retarding layer; and performing a second etch process to recess the horns to establish the gate material with a desired profile.
    Type: Application
    Filed: January 18, 2023
    Publication date: April 11, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Wei Yin, Tzu-Wen Pan, Yu-Hsien Lin, Jih-Sheng Yang, Shih-Chieh Chao, Chia Ming Liang, Yih-Ann Lin, Ryan Chia-Jen Chen
  • Patent number: 5647626
    Abstract: A non-vacuum semiconductor pick-up and transfer apparatus for handling semiconductor wafers. A flat tapered blade, with front and rear arcuate abutment surfaces adapted to hold a wafer, is provided. In use the blade is thrust between spaced wafers supported in a holder, lifted to retain the wafer between the abutment surfaces, and removed from the holder. The thin and tapered blade shape minimizes damage to the associated wafers in the event of a misalignment of the blade with the wafers.
    Type: Grant
    Filed: December 4, 1995
    Date of Patent: July 15, 1997
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Feng Chen, Jun-Sheng Hsu, Shih-Ming Pan, Knight-Tian Ou