Patents by Inventor Shih-Shiung Yang

Shih-Shiung Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Damper for a gauge sensor in a dry etch chamber
    Patent number: 7043991
    Abstract: A damper for protecting a gauge sensor measuring the pressure of a dry etch chamber. The damper includes a vacuum tube for connecting the gauge with the chamber and at least one plate for blocking the plasma of the chamber from directly striking against the sensor. The at least one plate is disposed at the inner wall of the vacuum tube to effectively prevent the plasma from attaching onto the sensor so as to maintain the sensitivity of the sensor and prolong the lifetime of the gauge.
    Type: Grant
    Filed: November 14, 2003
    Date of Patent: May 16, 2006
    Assignee: AU Optronics Corp.
    Inventors: Shun-Huang Peng, Shih-Shiung Yang, Chung-Chi Liang, Ming-Yi Huang
  • Damper for a gauge sensor in a dry etch chamber
    Publication number: 20050022604
    Abstract: A damper for protecting a gauge sensor measuring the pressure of a dry etch chamber. The damper includes a vacuum tube for connecting the gauge with the chamber and at least one plate for blocking the plasma of the chamber from directly striking against the sensor. The at least one plate is disposed at the inner wall of the vacuum tube to effectively prevent the plasma from attaching onto the sensor so as to maintain the sensitivity of the sensor and prolong the lifetime of the gauge.
    Type: Application
    Filed: November 14, 2003
    Publication date: February 3, 2005
    Inventors: Shun-Huang Peng, Shih-Shiung Yang, Chung-Chi Liang, Ming-Yi Huang