Abstract: A method includes providing a substrate having a surface such that a first hard mask layer is formed over the surface and a second hard mask layer is formed over the first hard mask layer, forming a first pattern in the second hard mask layer, where the first pattern includes a first mandrel oriented lengthwise in a first direction and a second mandrel oriented lengthwise in a second direction different from the first direction, and where the first mandrel has a top surface, a first sidewall, and a second sidewall opposite to the first sidewall, and depositing a material towards the first mandrel and the second mandrel such that a layer of the material is formed on the top surface and the first sidewall but not the second sidewall of the first mandrel.

Abstract: An inner-diameter quenching device is provided with a workpiece holding assembly for holding a workpiece to be quenched, a spray cylinder, and a heating coil. The workpiece has a central axis. The spray cylinder is disposed at a first side of the workpiece holding assembly and driven by a lifting assembly to move along the central axis into an inner diameter of the workpiece. The heating coil is disposed at a second side of the workpiece holding assembly and located on and movable along the central axis. The heating coil and the spray cylinder are separated and movable in opposite directions along the same center axis, which can further reduce the size of the quenching device, making it suitable for quenching a small inner-diameter workpiece. Besides, the spray apertures are inclined, so that the cooling liquid can be sprayed out more easily to enhance the quenching effect.

Abstract: An inner-diameter quenching device is provided with a workpiece holding assembly for holding a workpiece to be quenched, a spray cylinder, and a heating coil. The workpiece has a central axis. The spray cylinder is disposed at a first side of the workpiece holding assembly and driven by a lifting assembly to move along the central axis into an inner diameter of the workpiece. The heating coil is disposed at a second side of the workpiece holding assembly and located on and movable along the central axis. The heating coil and the spray cylinder are separated and movable in opposite directions along the same center axis, which can further reduce the size of the quenching device, making it suitable for quenching a small inner-diameter workpiece. Besides, the spray apertures are inclined, so that the cooling liquid can be sprayed out more easily to enhance the quenching effect.