Patents by Inventor SHIH-TING ZENG

SHIH-TING ZENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for intelligent dispatching for wafer processing
    Patent number: 9412595
    Abstract: Systems and methods are provided for ion implantation. For example, ion implantation is performed using a first ion implant tool. At least one condition parameter associated with the first ion implant tool is dynamically obtained. Whether the first ion implant tool is in a first condition is determined based on the at least one condition parameter. Ion implantation is performed using a second ion implant tool based on the determination.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: August 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Kuo-Yuan Ho, Li-Jen Chen, Chih-Cheng Kao, Shih-Ting Zeng, Yi-Hsiung Lin
  • SYSTEMS AND METHODS FOR INTELLIGENT DISPATCHING FOR WAFER PROCESSING
    Publication number: 20150170917
    Abstract: Systems and methods are provided for ion implantation. For example, ion implantation is performed using a first ion implant tool. At least one condition parameter associated with the first ion implant tool is dynamically obtained. Whether the first ion implant tool is in a first condition is determined based on the at least one condition parameter. Ion implantation is performed using a second ion implant tool based on the determination.
    Type: Application
    Filed: December 18, 2013
    Publication date: June 18, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: KUO-YUAN HO, LI-JEN CHEN, CHIH-CHENG KAO, SHIH-TING ZENG, YI-HSIUNG LIN