Abstract: Gas distribution assemblies for a semiconductor manufacturing processing chamber comprising a first showerhead with a first flange and a second showerhead with a second flange. A first two-piece RF isolator comprises a first inner RF isolator spaced from a first outer RF isolator. The first inner RF isolator spaced from the first flange of the first showerhead to create a first flow path. A second two-piece RF isolator comprises a second inner RF isolator spaced from a second outer RF isolator. The second RF isolator spaced from the second flange of the second showerhead to create a second flow path. Processing chambers incorporating the gas distribution assemblies, and processing methods using the gas distribution assemblies are also described.

Abstract: An apparatus and a method for automatically establishing a new wireless link when the original wireless link between the apparatus and a commercially available FM radio receiver is interfered by other signal sources and reception conditions become poor, thereby eliminating the need to manually configure both the target FM radio receiver and the apparatus to a suitable FM frequency. The apparatus receives an audio signal, modulates and transmits the audio signal to the target FM radio receiver over a selected frequency, scans an FM spectrum for an alternative frequency, transmits an Radio Data System compatible command and a forcible switching signal to configure the target FM radio receiver to tune to the alternative frequency when signal quality of the received signal deteriorate sufficiently.