Patents by Inventor Shih Yi-Cheng

Shih Yi-Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
    Publication number: 20250205834
    Abstract: A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance travelled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.
    Type: Application
    Filed: March 10, 2025
    Publication date: June 26, 2025
    Inventors: Vincent CHIEN, Shih YI-CHENG, Hill LIAO
  • Device maintenance in semiconductor manufacturing environment
    Patent number: 12246404
    Abstract: A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance travelled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.
    Type: Grant
    Filed: November 22, 2023
    Date of Patent: March 11, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Vincent Chien, Shih Yi-Cheng, Hill Liao
  • DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
    Publication number: 20240082964
    Abstract: A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance travelled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.
    Type: Application
    Filed: November 22, 2023
    Publication date: March 14, 2024
    Inventors: Vincent CHIEN, Shih YI-CHENG, Hill LIAO
  • Device maintenance in semiconductor manufacturing environment
    Patent number: 11850692
    Abstract: A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance travelled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTORMANUFACTURING COMPANY LIMITED
    Inventors: Vincent Chien, Shih Yi-Cheng, Hill Liao
  • Device maintenance in semiconductor manufacturing environment
    Patent number: 11819965
    Abstract: A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance traveled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: November 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Vincent Chien, Shih Yi-Cheng, Hill Liao
  • DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
    Publication number: 20220355425
    Abstract: A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance travelled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 10, 2022
    Inventors: Vincent CHIEN, Shih YI-CHENG, Hill LIAO
  • DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
    Publication number: 20200361041
    Abstract: A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance traveled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.
    Type: Application
    Filed: May 17, 2019
    Publication date: November 19, 2020
    Inventors: Vincent Chien, Shih Yi-Cheng, Hill Liao