Abstract: A spatial light modulator (SLM) includes a first liquid crystal panel and a second liquid crystal panel that are oppositely configured, and a polarization adjustment part configured between the first liquid crystal panel and the second liquid crystal panel. An alignment direction of the first liquid crystal panel is parallel to an alignment direction of the second liquid crystal panel. The first liquid crystal panel is configured to perform a phase modulation on incident linear-polarized light. The polarization adjustment part is configured to rotate, by a preset angle, a polarization direction of linear-polarized light exited from the first liquid crystal panel. The second liquid crystal panel is configured to adjust a polarization state of linear-polarized light exited from the polarization adjustment part to adjust an amplitude of exited light.

Abstract: The present invention discloses a MEMS gravimeter comprising: a spring-mass system, a displacement sensing structure, a displacement detecting circuit, a cavity body and a level adjustment base; the spring-mass system is disposed inside the cavity body and includes: a negative-stiffness spring, a positive-stiffness spring, a proof mass and an outer frame; the proof mass is connected to the outer frame by the negative-stiffness spring and the positive-stiffness spring, the negative-stiffness spring and the positive-stiffness spring are symmetrically disposed with respect to the proof mass, and the outer frame is fixedly connected to the cavity body; the displacement sensing structure is located on a surface of the proof mass, and the displacement detecting circuit is configured to detect a displacement signal from the displacement sensing structure; the spring-mass system realizes reduction in resonant frequency by matching of the positive and negative stiffness springs; and change in gravitational acceleratio