Abstract: Metrology target design methods and verification targets are provided. Methods comprise using OCD data related to designed metrology target(s) as an estimation of a discrepancy between a target model and a corresponding actual target on a wafer, and adjusting a metrology target design model to compensate for the estimated discrepancy. The dedicated verification targets may comprise overlay target features and be size optimized to be measureable by an OCD sensor, to enable compensation for inaccuracies resulting from production process variation. Methods also comprise modifications to workflows between manufacturers and metrology vendors which provide enable higher fidelity metrology target design models and ultimately higher accuracy of metrology measurements.

Abstract: This invention provides a fiber Bragg grating (FBG) monitoring device for dynamic disasters in coal mines. It includes a data acquisition device, which is used to collect the seismic wave signal in coal mines and reflect the possibility of the current coal and gas outburst hazard through the seismic wave signal described; a data processing device, which is used to process the collected data, eliminate the interferential signal and convert the effective signal into the measured physical quantity, and then send it to the display unit or save it; a real-time processor, which is used to achieve the acquisition and processing of real-time data; a display unit, which is used for the process of acquisition, storage, display and historical data query, and the display of residual capacity; a power supply unit, which is used to provide energy for the whole monitoring device.

Abstract: The invention declares a FBG (fiber Bragg grating) intelligent device and method for monitoring coal level in bunker. The device comprises a support device located above the bunker and detachably connected with a vibration device. The vibration device, with a surrounding reserved groove on its shell, extends into the bunker, and the groove is used for embedding FBG sensing device which is connected with FBG Network Demodulator. The Demodulator is electrically connected with a data processing system which is electrically connected with an alarm device, and the alarm device is connected with the belt conveyer. The invention relates to wavelength drifts of FGB, which has fast response and high precision, and can transmit signals to the display device first, providing good operating environment for the bunker.

Abstract: An overlay metrology system is disclosed. The overlay metrology system includes a controller configured to be communicatively coupled with an overlay metrology subsystem. The controller receives overlay measurements from the overlay metrology subsystem and generates one or more quality metrics. The controller extracts a set of principle components from the one or more quality metrics. The controller generates input data and inputs the input data into an input matrix of a supervised machine learning algorithm to train a predictive model. The controller then identifies a recipe or hardware configuration with a minimum residual value.

Abstract: An overlay metrology system is disclosed. The overlay metrology system includes a controller configured to be communicatively coupled with an overlay metrology subsystem. The controller receives overlay measurements from the overlay metrology subsystem and generates one or more quality metrics. The controller extracts a set of principle components from the one or more quality metrics. The controller generates input data and inputs the input data into an input matrix of a supervised machine learning algorithm to train a predictive model. The controller then identifies a recipe or hardware configuration with a minimum residual value.

Abstract: Metrology target design methods and verification targets are provided. Methods comprise using OCD data related to designed metrology target(s) as an estimation of a discrepancy between a target model and a corresponding actual target on a wafer, and adjusting a metrology target design model to compensate for the estimated discrepancy. The dedicated verification targets may comprise overlay target features and be size optimized to be measureable by an OCD sensor, to enable compensation for inaccuracies resulting from production process variation. Methods also comprise modifications to workflows between manufacturers and metrology vendors which provide enable higher fidelity metrology target design models and ultimately higher accuracy of metrology measurements.

Abstract: The disclosure provides a method for preparing an electrolyte and an electrolyte replenishment system during an electrolytic process. The method includes the following steps: Step A: placing aluminum in a reactor, vacuumizing the reactor and feeding an inert gas, heating the reactor to 700-850 degrees centigrade, and adding one or more of potassium fluozirconate, potassium fluoborate, sodium hexafluorozirconate and sodium fluoroborate; and Step B: stirring the reactants for 4-6 hours and extracting the upper molten liquid to obtain an electrolyte replenishment system during an aluminum electrolysis process. The disclosure has the following beneficial effects: when used in the aluminum electrolysis industry, the electrolyte system provided herein can be directly used as an aluminum electrolyte or a replenishment system in an electrolyte without changing existing electrolysis technology to significantly reduce an electrolysis temperature during an aluminum electrolysis process.

Abstract: A method for preparing zirconium boride and synchronously preparing a cryolite is provided which includes the following steps: Step A: placing aluminum in a reactor, heating the reactor to 700-850 degrees centigrade, and adding the mixture of fluorozirconate and fluoborate; and Step B: stirring the reactants for 4-6 hours and extracting the upper molten liquid to obtain a cryolite, wherein the lower substance is zirconium boride. The disclosure has the following beneficial effects: the new zirconium boride preparation method provided herein is simple in preparation flow and the device used, short in preparation period and high in reaction efficiency, the prepared zirconium boride with many contact angles has a large specific surface area and contains a controllable amount of aluminum.

Abstract: A method for preparing an aluminum-zirconium-boron alloy and synchronously preparing a cryolite is provided. The method includes the following steps: Step A: placing aluminum in a reactor, heating the reactor to 700-850 degrees centigrade, and adding a mixture consisting of fluorozirconate and fluoborate in a molar ratio of x: y into the reactor; Step B: stirring the reactants for 4-6 hours and extracting the upper molten liquid to obtain a cryolite, wherein the lower substance is an aluminum-zirconium-boron alloy, and aluminum is added in an excess amount. The method provided herein for preparing an aluminum-zirconium-boron alloy which is mild in reaction condition, easy to control and simple in technical flow can prepare a high-quality product through a complete reaction, besides, the use of the synchronously prepared low molecular ratio cryolites (KF.AlF3 and NaF.AlF3) in the aluminum electrolysis industry can achieve a proper electrical conductivity.

Abstract: The present invention provides an alloy for magnesium and magnesium alloy grain refinement, and a preparation method thereof, the alloy as a grain refiner being an aluminum-zirconium-boron intermediate alloy comprising the following chemical compositions by weight percent: 5-20% of Zr, 0.5-4% of B, and the balance being Al. The invention can achieve the following technical effect: an intermediate alloy with strong nucleation capability and excellent capability of magnesium and magnesium alloy grain refinement is invented and its preparation method is provided. This kind of grain refiner can be applied to casting deformation plastic processing of magnesium and magnesium alloy profiles, with high degree of refinement, to promote the extensive industrial applications of magnesium.

Abstract: The disclosure provides a method for preparing an electrolyte and an electrolyte replenishment system during an electrolytic process. The method includes the following steps: Step A: placing aluminum in a reactor, vacuumizing the reactor and feeding an inert gas, heating the reactor to 700-850 degrees centigrade, and adding one or more of potassium fluozirconate, potassium fluoborate, sodium hexafluorozirconate and sodium fluoroborate; and Step B: stirring the reactants for 4-6 hours and extracting the upper molten liquid to obtain an electrolyte replenishment system during an aluminum electrolysis process. The disclosure has the following beneficial effects: when used in the aluminum electrolysis industry, the electrolyte system provided herein can be directly used as an aluminum electrolyte or a replenishment system in an electrolyte without changing existing electrolysis technology to significantly reduce an electrolysis temperature during an aluminum electrolysis process.

Abstract: A method for preparing zirconium boride and synchronously preparing a cryolite is provided which includes the following steps: Step A: placing aluminum in a reactor, heating the reactor to 700-850 degrees centigrade, and adding the mixture of fluorozirconate and fluoborate; and Step B: stirring the reactants for 4-6 hours and extracting the upper molten liquid to obtain a cryolite, wherein the lower substance is zirconium boride. The disclosure has the following beneficial effects: the new zirconium boride preparation method provided herein is simple in preparation flow and the device used, short in preparation period and high in reaction efficiency, the prepared zirconium boride with many contact angles has a large specific surface area and contains a controllable amount of aluminum.

Abstract: A method for preparing an aluminum-zirconium-boron alloy and synchronously preparing a cryolite is provided. The method includes the following steps: Step A: placing aluminum in a reactor, heating the reactor to 700-850 degrees centigrade, and adding a mixture consisting of fluorozirconate and fluoborate in a molar ratio of x: y into the reactor; Step B: stirring the reactants for 4-6 hours and extracting the upper molten liquid to obtain a cryolite, wherein the lower substance is an aluminum-zirconium-boron alloy, and aluminum is added in an excess amount. The method provided herein for preparing an aluminum-zirconium-boron alloy which is mild in reaction condition, easy to control and simple in technical flow can prepare a high-quality product through a complete reaction, besides, the use of the synchronously prepared low molecular ratio cryolites (KF.AlF3 and NaF.AlF3) in the aluminum electrolysis industry can achieve a proper electrical conductivity.