Abstract: A gas analysis system. The system includes a Fourier transform infrared (FTIR) spectrometer, a signal transformation module, an unknown chemical analysis module, a calibration model determination module, and a gas concentration calculation module. The signal transformation module receives electronic signals corresponding respectively to background and sample interferograms corresponding to a sample gas from the FTIR spectrometer for further calculation to obtain an absorption spectrum of the sample gas. The unknown chemical analysis module qualitatively analyzes the absorption spectrum of the sample gas to determine the chemical species in the sample gas. The calibration model determination module decides a calibration model. The gas concentration calculation module calculates the gas concentration of each chemical species according to the absorption spectrum, the calibration model and a standard spectrum of the chemical species.

Abstract: A gas analysis system. The system includes a Fourier transform infrared (FTIR) spectrometer, a signal transformation module, an unknown chemical analysis module, a calibration model determination module, and a gas concentration calculation module. The signal transformation module receives electronic signals corresponding respectively to background and sample interferograms corresponding to a sample gas from the FTIR spectrometer for further calculation to obtain an absorption spectrum of the sample gas. The unknown chemical analysis module qualitatively analyzes the absorption spectrum of the sample gas to determine the chemical species in the sample gas. The calibration model determination module decides a calibration model. The gas concentration calculation module calculates the gas concentration of each chemical species according to the absorption spectrum, the calibration model and a standard spectrum of the chemical species.

Abstract: A dielectric barrier discharge apparatus and module for perfluorocompound (PFC) abatement. The apparatus includes a housing, first dielectric tube disposed in the housing, a second dielectric tube disposed in the first dielectric tube, and at least one electrode disposed in the housing. By this arrangement, a first cooling gas passage is formed between the housing and the first dielectric tube, a PFC passage is formed between the first and second dielectric tubes, and a second cooling gas passage is formed in the second dielectric tube. When the applied voltage for the electrodes is greater than a breakdown voltage, high energetic electrons generated in the PFC passage can ionize or dissociate the PFC to be removed. Meanwhile, cooling gas is introduced to the cooling gas passage for cooling the electrodes. A dielectric barrier discharge module composed of a plurality of dielectric barrier discharge apparatuses is provided to promote the capacity of the treatment of PFC gases.

Abstract: A dielectric barrier discharge apparatus and module for perfluorocompound (PFC) abatement. The apparatus includes a housing, first dielectric tube disposed in the housing, a second dielectric tube disposed in the first dielectric tube, and at least one electrode disposed in the housing. By this arrangement, a first cooling gas passage is formed between the housing and the first dielectric tube, PFC passage is formed between the first and second dielectric tubes, and a second cooling gas passage is formed in the second dielectric tube. When the applied voltage for the electrodes is greater than a breakdown voltage, high energetic electrons generated in the PFC passage can ionize or dissociate the PFC to be removed. Meanwhile, cooling gas is introduced to the cooling gas passage for cooling the electrodes. A dielectric barrier discharge module composed of a plurality of dielectric barrier discharge apparatuses is provided to promote the capacity of the treatment of PFC gases.