Abstract: A semiconductor device includes a device isolation structure, a recess channel structure, a first lower gate conductive layer conformal to the recess channel structure and defining a recess, a holding layer over the first lower gate conductive layer to fill the recess defined by the first lower gate conductive layer, and a second lower gate conductive layer over the first lower gate conductive layer and the holding layer. The holding layer is configured to hold a shift of the seam occurring in the recess channel structure.

Abstract: A semiconductor device comprises a gate electrode buried in a trench within a semiconductor substrate, a first sealing insulating film disposed over the gate electrode and the semiconductor substrate, an ion-implanting region disposed in portions of the semiconductor substrate adjacent to sidewalls of the trench, and a second sealing insulating film formed over the first sealing insulating film to bury the trench.

Abstract: A semiconductor device includes a device isolation structure, a recess channel structure, a first lower gate conductive layer conformal to the recess channel structure and defining a recess, a holding layer over the first lower gate conductive layer to fill the recess defined by the first lower gate conductive layer, and a second lower gate conductive layer over the first lower gate conductive layer and the holding layer. The holding layer is configured to hold a shift of the seam occurring in the recess channel structure.

Abstract: A method of forming a transistor in a semiconductor device includes forming device isolation structures in a substrate to define an active region. An oxide-based layer and a nitride-based layer are then formed between the active region and the device isolation structures. A predetermined gate region is etched in the active region to form a recess region. The damage layers are formed by a tilted ion implantation process using neutral elements on portions of the oxide-based layer exposed at the sidewalls of the recess region and other portions of the oxide-based layer below the recess region. The damage layers are then removed, thus causing a portion of the active region exposed at the bottom of the recess region to protrude.

Abstract: A semiconductor device includes a device isolation structure, a recess channel structure, and a gate electrode. The device isolation structure is formed in a semiconductor substrate to define an active region. The recess channel structure is disposed in the semiconductor substrate under the active region. The gate electrode includes a holding layer disposed in a gate region to fill the recess channel structure. The holding layer prevents a seam and a shift of the seam occurring in the recess channel structure.

Abstract: The disclosed semiconductor device includes a plurality of active patterns including first active patterns which protrude from a semiconductor substrate and have a first width and second active patterns which are connected to upper ends of the respective first active patterns and have a second width greater than the first width. The semiconductor device further includes isolation patterns respectively located between the active patterns to insulate the active patterns from one another.

Abstract: A method of forming a transistor in a semiconductor device includes forming device isolation structures in a substrate to define an active region. An oxide-based layer and a nitride-based layer are then formed between the active region and the device isolation structures. A predetermined gate region is etched in the active region to form a recess region. The damage layers are formed by a tilted ion implantation process using neutral elements on portions of the oxide-based layer exposed at the sidewalls of the recess region and other portions of the oxide-based layer below the recess region. The damage layers are then removed, thus causing a portion of the active region exposed at the bottom of the recess region to protrude.

Abstract: The disclosed semiconductor device includes a plurality of active patterns including first active patterns which protrude from a semiconductor substrate and have a first width and second active patterns which are connected to upper ends of the respective first active patterns and have a second width greater than the first width. The semiconductor device further includes isolation patterns respectively located between the active patterns to insulate the active patterns from one another.

Abstract: A semiconductor device includes a device isolation structure, a recess channel structure, and a gate electrode. The device isolation structure is formed in a semiconductor substrate to define an active region. The recess channel structure is disposed in the semiconductor substrate under the active region. The gate electrode includes a holding layer disposed in a gate region to fill the recess channel structure. The holding layer prevents a seam and a shift of the seam occurring in the recess channel structure.