Abstract: A method includes forming a fin protruding from a substrate, the fin including an epitaxial stack over a fin base and a hard mask layer over the epitaxial stack, the epitaxial stack including first and second semiconductor layers of different material compositions, performing a first etching process to etch the hard mask layer, the first etching process including applying a first combination of etchants, performing a second etching process to etch the epitaxial stack, the second etching process including applying a second combination of etchants, and performing a third etching process to etch the fin base, the third etching process including applying a third combination of etchants. The first, second, and third combinations of etchants are different from each other.

Abstract: A sensing cell includes: a first electrode coupled to a gate of a transistor, a second electrode spaced apart from the first electrode; a protective layer covering sidewalls of the first electrode and the second electrode and having a first opening and a second opening exposing a first part of the first electrode and a second part of the second electrode, respectively; a first well located on the protective layer and surrounding the first electrode and the second electrode and having a third opening exposing the first part of the first electrode, the second part of the second electrode, and the protective layer between the first opening and the second opening; a second well located on the protective layer surrounding the first well and having a fourth opening to limit a flow of a liquid to be tested; and an ion selective membrane located in the third opening.

Abstract: A sensing cell includes: a first electrode coupled to a gate of a transistor, a second electrode spaced apart from the first electrode; a protective layer covering sidewalls of the first electrode and the second electrode and having a first opening and a second opening exposing a first part of the first electrode and a second part of the second electrode, respectively; a first well located on the protective layer and surrounding the first electrode and the second electrode and having a third opening exposing the first part of the first electrode, the second part of the second electrode, and the protective layer between the first opening and the second opening; a second well located on the protective layer surrounding the first well and having a fourth opening to limit a flow of a liquid to be tested; and an ion selective membrane located in the third opening.

Abstract: A detecting method for blood is provided. The method includes the following steps. A sensing device including a base and at least one response electrode is provided, wherein the response electrode is spaced apart from a gate end of the base. Blood including blood cells and targets is disposed on the response electrode. The blood is separated into a first part and a second part, wherein the first part is in contact with the response electrode, and the blood cell count in the first part is less than that in the second part. A voltage is applied on the response electrode, such that an electric field is generated between the response electrode and the gate end of the base, and a detection current generated from the base is measured to detect a characterize of the targets.

Abstract: A detecting method for blood is provided. The method includes the following steps. A sensing device including a base and at least one response electrode is provided, wherein the response electrode is spaced apart from a gate end of the base. Blood including blood cells and targets is disposed on the response electrode. The blood is separated into a first part and a second part, wherein the first part is in contact with the response electrode, and the blood cell count in the first part is less than that in the second part. A voltage is applied on the response electrode, such that an electric field is generated between the response electrode and the gate end of the base, and a detection current generated from the base is measured to detect a characterize of the targets.