Patents by Inventor Shin-Myoung KIM

Shin-Myoung KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20250051919
    Abstract: The present disclosure relates to a substrate processing apparatus and a substrate processing method, and more particularly, to a substrate processing apparatus and a substrate processing method for accurately accommodating a substrate at a central portion of a susceptor even when a tilt angle or a tilt direction of the susceptor on which the substrate is accommodated changes for each substrate or for each substrate process.
    Type: Application
    Filed: August 6, 2024
    Publication date: February 13, 2025
    Applicant: TES CO., LTD
    Inventors: Shin-Myoung KIM, Hyun-Suk SONG, Hee-Won KIM
  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20240370041
    Abstract: Provided is a substrate processing apparatus and a substrate processing method, more particularly, a substrate processing apparatus and a substrate processing method that reduce attachment of foreign substances such as particles to a substrate when the substrate is inserted into a process chamber of the substrate processing apparatus or is drawn out of the process chamber.
    Type: Application
    Filed: April 21, 2024
    Publication date: November 7, 2024
    Applicant: TES CO., LTD
    Inventors: Shin-Myoung KIM, Il KIM, Jae-Hoon LEE