Abstract: A gate valve for a process chamber includes a valve blade for closure of an opening communicating to the process chamber. The valve blade is employed to seal the opening in a valve housing. The valve blade moves first in a vertical direction and then in a horizontal direction normal to the opening when sealing against the opening. The valve blade moves first in the horizontal direction and subsequently in a vertical direction when disengaging from the opening.

Abstract: Disclosed is a gate valve which comprises a valve blade 120 which is configured to close the opening 112 in a valve housing 110; a valve rod 130 which is connected to the valve blade 120 and is configured to move in upward and downward directions and a horizontal direction; a guide housing 140 which is connected to an outer side of the valve housing 110; an L-motion block 150 which is engaged and connected to the valve rod 130, with a guide roller 151 being installed at both sides of the L-motion block 150; a cam block 160 which is installed in the interior of the guide housing 140; a driving rod engaging roller 172 which is installed at an lower end of the valve rod 130; a driving rod 170 in which the driving rod engaging roller 172 is inserted and guided and which has a driving rod slanted groove 171 obliquely formed in a closing direction “C” in a downward direction; an elasticity providing unit 175 which is configured to provide elasticity between the L-motion block 150 and the driving rod 170; and an upw

Abstract: The present invention disclosed herein relates to a gate valve, in which only one driving unit is provided, thus obtaining a reliable structure, and although either a closing operation may be performed in such a way that the valve plate is moved from an opening position to an intermediate portion in a vertical direction, and then from its intermediate position to a closing position in a horizontal direction which is vertical with respect to the vertical direction, or an opening operation may be performed in the sequence reverse to the above mentioned sequence.

Abstract: Disclosed is a gate valve, which comprises a valve blade 120 which is configured to close the opening 112 in a valve housing 11; a valve rod 130 which is connected to the valve blade 120 and is configured to move in upward and downward directions and in a horizontal direction; a guide housing 140 which is connected to an outer side of the valve housing 110, wherein at both inner sides of the guide housing 140, there is provided an L-motion block guide groove 142; an L-motion block 150 which is connected to the valve rod 130, wherein at both sides of the L-motion block 150, a guide roller 151 inserted and driven in the L-motion block guide groove 142 is installed; a driving block 160 which is connected to an upper side and an lower side of the L-motion block 150 by way of at least one link 155, respectively; at least one tensile elasticity unit 170 which is installed between the L-motion block 150 and the driving block 160; and an upward and downward driving unit 180 which is configured to drive the driving bl