Patents by Inventor Shing-Shing King

Shing-Shing King has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of wet etching of polyimide
    Patent number: 5342736
    Abstract: A method of wet etching of polyimide comprising the steps of(a) cleaning a substrate for coating;(b) coating a polyamic acid varnish onto said cleaned substrate;(c) thermal curing the varnish in (b) to form a polyimide layer on the substrate;(d) coating a polyamide-imide varnish onto the layer in (c);(e) curing the varnish in (d),(f) coating a layer of photoresist onto the coated substrate;(g) masked exposing;(h) image developing on said substrate; and(i) wet etching the unprotected portion in the layers of polyimide and polyamide-imide to form a staircase pattern on the substrate.
    Type: Grant
    Filed: January 16, 1992
    Date of Patent: August 30, 1994
    Assignee: Industrial Technology Research Institute
    Inventors: Ker-Ming Chen, Tsung-Hsiung Wang, Shing-Shing King, Tzong-Ming Lee