Abstract: An operating method of an exhaust gas treatment facility, which is a method for operating an exhaust gas treatment facility that treats exhaust gas from an electronic component manufacturing process, the operating method comprising: the exhaust gas treatment apparatus being provided with a wet exhaust gas treatment apparatus including a water sprinkling mechanism; and setting a pH of water in the wet exhaust gas treatment apparatus within 5 to 8. The exhaust gas may contain a tungsten compound.

Abstract: An exhaust gas treatment facility includes a combustion chamber 1 for applying combustion treatment to exhaust gas, a nozzle for causing water to flow along the inner wall surface of the combustion chamber 1, a water supply line for supplying water to the nozzle, a primary wet scrubbing chamber 11, and a wet scrubber 20, etc. When removing a solid matter from the wet scrubber 20, an alkaline-based cleaning agent solution is injected to a lower water tank 44 from a chemical dispensing device 50, and a circulation pump 23 is operated to sprinkle water from a nozzle 21. Cleaning is ended if the detected pH by pH meters 52, 53 maintains a defined pH for a predetermined time or more.

Abstract: An exhaust gas treatment facility includes: a combustion chamber for combustion-treating an exhaust gas; a nozzle for letting water flow along an inner wall surface of the combustion chamber; a water-feeding line for supplying water to the nozzle; a primary gas-cleaning chamber; a scrubber; and the like. The water-feeding line has a pipe, a pump, and pipes. An alkali-adding apparatus is provided on the pipe on an upstream side of the pump. The alkali-adding apparatus is controlled so as to regulate a detected pH by a pH meter to be 10 or higher.

Abstract: A relay apparatus for transferring data between a terminal on which an application runs and a server, the relay apparatus including, a TCP management module for monitoring a packet to be transmitted and received by using TCP connection established between the terminal and the server; a determination module for analyzing a request packet and determining whether or not to switch a communication route for transmitting the request packet; a request transmission module for establishing new TCP connection on a new communication route and transmitting the request packet to the server; and a data relay module for transferring a data storage packet to the terminal by using the new TCP connection.