Abstract: In order to expand the surface area of a reflective layer, the space between adjacent turns of a drive coil, which is wound a plurality of turns on a peripheral edge front surface of the principal surface of a movable portion which, being inside a frame-formed support substrate, is connected to the support substrate by torsion bars, is filled and flattened with a smoothing layer, thereby adopting a configuration such that the reflective layer can also be provided in the region of the upper surface of the drive coil.

Abstract: The optical scanning device includes: a movable portion having a reflecting mirror; an intermediate frame; a support portion enclosing the intermediate frame; a first torsion bar connecting the movable portion and the intermediate frame to each other; a second torsion bar connecting the intermediate frame and the support portion to each other; a first wire formed on the movable portion; a second wire formed on the intermediate frame; a magnet; a first drive waveform generation unit configured to supply a first drive signal to the first wire; a second drive waveform generation unit configured to supply a second drive signal to the second wire; and a correction signal generation unit configured to generate a correction signal by shifting a phase of the branch-off first drive signal and multiplying an amplitude of the branch-off first drive signal by a gain, and superimpose the correction signal on the second drive signal.

Abstract: In order to expand the surface area of a reflective layer, the space between adjacent turns of a drive coil, which is wound a plurality of turns on a peripheral edge front surface of the principal surface of a movable portion which, being inside a frame-formed support substrate, is connected to the support substrate by torsion bars, is filled and flattened with a smoothing layer, thereby adopting a configuration such that the reflective layer can also be provided in the region of the upper surface of the drive coil.