Patents by Inventor Shingo Okazaki

Shingo Okazaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing process for semiconductor device
    Patent number: 5328871
    Abstract: A manufacturing process for a semiconductor device comprising the following steps: to spin-coat by Spin-on method a solution for forming a SOG film on a wafer having a device formed on the surface to form a coating of the SOG film forming solute thereon; to treat by a liquid which is able to dissolve the solute for forming SOG film at least a part of the wafer which is held by claws of a dry etching system at a later stage in the series of processes, thereby removing a coating of the SOG film forming solute at that part; and to then bake the wafer to complete a SOG film.
    Type: Grant
    Filed: February 11, 1992
    Date of Patent: July 12, 1994
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Makoto Tanigawa, Shingo Okazaki