Abstract: A vacuum pump comprises a screw groove exhaust section including a rotor cylindrical section and a stator; a base; an inner stator forming an inner gas discharge path between an inner peripheral surface of the rotor cylindrical section and the inner stator; an outer stator forming an outer gas discharge path between an outer peripheral surface of the rotor cylindrical section and the outer stator, and being thermally coupled to the inner stator; a communication opening formed on the rotor, and allowing the outer gas discharge path and the inner gas discharge path to communicate with each other on an upstream side; an exhaust opening discharging the joined gas of the gas passing through the outer gas discharge path and the gas passing through the inner gas discharge path from the screw groove exhaust section toward the exhaust port.

Abstract: A turbo-molecular pump comprises: a pump rotor including rotor blades and a rotor cylindrical section; stationary blades facing the rotor blades; a cylindrical stator facing the rotor cylindrical section; a base housing the cylindrical stator; and a heating member for heating the cylindrical stator. An emissivity of an outer surface of the cylindrical stator and an emissivity of an outer surface of a member facing the cylindrical stator, the outer surface facing the cylindrical stator, are lower than the emissivity of outer surfaces of the rotor blades, the outer surfaces facing the stationary blades.

Abstract: A turbomolecular pump includes: a rotor (4) on which rotary vanes (19) in multiple stages are formed; fixed vanes (21) in multiple stages; and a pump casing (7) in which a pump inlet opening (7a) is defined, and that houses the rotor (4) and the fixed vanes (21) in multiple stages; wherein: a surface of the rotor (4) facing the inlet opening has a first emissivity; a surface of one vane stage that is visible from the inlet opening, among a plurality of vane stages including the rotary vanes (19) and the fixed vanes (21), has the first emissivity; and a surface of one vane stage, among the plurality of vane stages, that is not visible from the inlet opening has a second emissivity that is greater than the first emissivity.

Abstract: A turbo-molecular pump comprises: a case having a suction port and a flange; a rotor assembly housed inside the case, the rotor assembly having a shaft and a rotor integrated with the shaft with a fastening bolt, the rotor having a plurality of rotor blades formed thereon; a plurality of stator blades housed inside the case and arranged to face the rotor blades; and a plurality of spacers stacked along a peripheral surface of the case, the spacer fixing the stator blades. An anti-corrosion treatment is applied to a gas contacting section in a component that is provided on an evacuation upstream side with respect to an evacuation downstream side end of the first rotor blade from the evacuation upstream side and made of an alloy containing Fe or Cr.

Abstract: A turbo-molecular pump comprises: a rotor; stationary blades; a stator; a plurality of spacers; a heater disposed on the base; a temperature sensor for detecting a temperature of the stator; and a temperature regulation section for on/off controlling the heater based on a temperature detected by the temperature sensor to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature. At least one spacer arranged on a base side of the plurality of spacers is cooled by coolant, and the turbo-molecular pump further comprises a heat insulation member disposed between the base and the spacer arranged on the base.

Abstract: A turbo-molecular pump comprises: a rotor having a plurality of stages of rotor blades and a cylindrical section; a plurality of stages of stationary blades alternately arranged with respect to the rotor blades; a stator arranged with a gap from the cylindrical section, the stator together with the cylindrical section constituting a screw groove pump section; a plurality of spacers stacked on a base, the spacers including at least one cooling spacer having a cooling section; a heater heating the stator; a temperature regulation section controlling the heater to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature; and an auxiliary ring for reaction product accumulation prevention at least a part of which is located in a space between the spacer facing a bottom step rotor blade, and the bottom step rotor blade.

Abstract: A turbo-molecular pump comprises a rotor having rotor blades and a cylindrical section; stationary blades; a plurality of spacers; a stator arranged with a gap from the cylindrical section, a base; a spacer cooling section arranged between a lowest spacer of the stacked spacers and the base, the spacer cooling section having a first flow passage through which coolant flows; a heater for heating the stator; a temperature sensor for detecting a temperature of the stator; a base cooling section for cooling the base, the base cooling section having a second flow passage connected in series to the first flow passage; and a temperature controller for controlling circulation of coolant to the first flow passage and the second flow passage connected in series and energization of the heater to maintain the temperature of the stator at a predetermined temperature.

Abstract: A turbo-molecular pump includes a case member, a rotor accommodated in the case member, the rotor having rotor blades arranged in multiple steps, a rotor shaft provided coaxially with the rotor, a plurality of stator blades provided on an inner surface of the case member and arranged between the rotor blades, and a plurality of spacers for supporting the stator blades. One of the plurality of spacers has a cooling thick portion for covering an outer peripheral side surface of at least one adjacent upper or lower spacer, and a cooling pipe through which a cooling medium is circulated is provided in the cooling thick portion.

Abstract: A turbo-molecular pump comprises: a pump rotor including rotor blades and a rotor cylindrical section; stationary blades facing the rotor blades; a cylindrical stator facing the rotor cylindrical section; a base housing the cylindrical stator; and a heating member for heating the cylindrical stator. An emissivity of an outer surface of the cylindrical stator and an emissivity of an outer surface of a member facing the cylindrical stator, the outer surface facing the cylindrical stator, are lower than the emissivity of outer surfaces of the rotor blades, the outer surfaces facing the stationary blades.

Abstract: A control unit, which is integrally mounted on a turbo molecular pump, is provided, in which the control unit can be miniaturized or the manufacturing costs are reduced. An upper casing (12) is fastened on a first mounting member (91) of an external device through a fastening member (61) inserted in a through hole (51) of a flange plate (12a). A first base (14) fastened on the upper casing (12) is fastened on a second mounting member (92) of the external device through a fastening member (63) inserted in a through hole (52) of a flange plate (14b). A control unit (70) is fastened on a second base (15) through a fastening member (65). Since torque produced when a rotor (30) is damaged is not asserted to the fastening member (65), strength of the fastening member (65) and a casing of the control unit (70) is small.

Abstract: A vacuum pump comprises a screw groove exhaust section including a rotor cylindrical section and a stator; a base; an inner stator forming an inner gas discharge path between an inner peripheral surface of the rotor cylindrical section and the inner stator; an outer stator forming an outer gas discharge path between an outer peripheral surface of the rotor cylindrical section and the outer stator, and being thermally coupled to the inner stator; a communication opening formed on the rotor, and allowing the outer gas discharge path and the inner gas discharge path to communicate with each other on an upstream side; an exhaust opening discharging the joined gas of the gas passing through the outer gas discharge path and the gas passing through the inner gas discharge path from the screw groove exhaust section toward the exhaust port.

Abstract: A turbo-molecular pump comprises: a rotor; stationary blades; a stator; a plurality of spacers; a heater disposed on the base; a temperature sensor for detecting a temperature of the stator; and a temperature regulation section for on/off controlling the heater based on a temperature detected by the temperature sensor to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature. At least one spacer arranged on a base side of the plurality of spacers is cooled by coolant, and the turbo-molecular pump further comprises a heat insulation member disposed between the base and the spacer arranged on the base.

Abstract: A turbo-molecular pump comprises a rotor having rotor blades and a cylindrical section; stationary blades; a plurality of spacers; a stator arranged with a gap from the cylindrical section, a base; a spacer cooling section arranged between a lowest spacer of the stacked spacers and the base, the spacer cooling section having a first flow passage through which coolant flows; a heater for heating the stator; a temperature sensor for detecting a temperature of the stator; a base cooling section for cooling the base, the base cooling section having a second flow passage connected in series to the first flow passage; and a temperature controller for controlling circulation of coolant to the first flow passage and the second flow passage connected in series and energization of the heater to maintain the temperature of the stator at a predetermined temperature.

Abstract: A turbo-molecular pump comprises: a rotor having a plurality of stages of rotor blades and a cylindrical section; a plurality of stages of stationary blades alternately arranged with respect to the rotor blades; a stator arranged with a gap from the cylindrical section, the stator together with the cylindrical section constituting a screw groove pump section; a plurality of spacers stacked on a base, the spacers including at least one cooling spacer having a cooling section; a heater heating the stator; a temperature regulation section controlling the heater to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature; and an auxiliary ring for reaction product accumulation prevention at least a part of which is located in a space between the spacer facing a bottom step rotor blade, and the bottom step rotor blade.

Abstract: A turbo-molecular pump comprises: a case having a suction port and a flange; a rotor assembly housed inside the case, the rotor assembly having a shaft and a rotor integrated with the shaft with a fastening bolt, the rotor having a plurality of rotor blades formed thereon; a plurality of stator blades housed inside the case and arranged to face the rotor blades; and a plurality of spacers stacked along a peripheral surface of the case, the spacer fixing the stator blades. An anti-corrosion treatment is applied to a gas contacting section in a component that is provided on an evacuation upstream side with respect to an evacuation downstream side end of the first rotor blade from the evacuation upstream side and made of an alloy containing Fe or Cr.

Abstract: A turbo-molecular pump includes a case member, a rotor accommodated in the case member, the rotor having rotor blades arranged in multiple steps, a rotor shaft provided coaxially with the rotor, a plurality of stator blades provided on an inner surface of the case member and arranged between the rotor blades, and a plurality of spacers for supporting the stator blades. One of the plurality of spacers has a cooling thick portion for covering an outer peripheral side surface of at least one adjacent upper or lower spacer, and a cooling pipe through which a cooling medium is circulated is provided in the cooling thick portion.

Abstract: A vacuum pump (1) includes: a rotor (30) provided with a rotor-side discharge function unit (32); a motor (36) that drives the rotor (30) to rotate with respect to a stator-side discharge function unit (22); and a cylindrical pump casing (2) made of a magnetic material, in which the rotor (30) and the stator-side discharge function unit (22) are disposed.

Abstract: A control unit, which is integrally mounted on a turbo molecular pump, is provided, in which the control unit can be miniaturized or the manufacturing costs are reduced. An upper casing (12) is fastened on a first mounting member (91) of an external device through a fastening member (61) inserted in a through hole (51) of a flange plate (12a). A first base (14) fastened on the upper casing (12) is fastened on a second mounting member (92) of the external device through a fastening member (63) inserted in a through hole (52) of a flange plate (14b). A control unit (70) is fastened on a second base (15) through a fastening member (65). Since torque produced when a rotor (30) is damaged is not asserted to the fastening member (65), strength of the fastening member (65) and a casing of the control unit (70) is small.

Abstract: A vacuum pump according to the invention includes a cylindrical pump casing for accommodating a rotor, a ring fitting part provided at an inlet area of the pump casing, a C-shaped ring of character C configuration devoid of portion of a ring member, fitted to the ring fitting part, and a protective net for stopping foreign matter, fitted to the inlet area by means of the C-shaped ring. As both ends of the C-shaped ring are formed so that the ends of the C-shaped ring are arranged overlapping each other in a circumferential direction in a state where the C-shaped ring is fitted to the pump casing, the deformation of the protective net for prevention of foreign matters is suppressed when air rushes into a pump casing, and therefore the dropping off of the protective net can be prevented.

Abstract: A turbomolecular pump includes: a rotor (4) on which rotary vanes (19) in multiple stages are formed; fixed vanes (21) in multiple stages; and a pump casing (7) in which a pump inlet opening (7a) is defined, and that houses the rotor (4) and the fixed vanes (21) in multiple stages; wherein: a surface of the rotor (4) facing the inlet opening has a first emissivity; a surface of one vane stage that is visible from the inlet opening, among a plurality of vane stages including the rotary vanes (19) and the fixed vanes (21), has the first emissivity; and a surface of one vane stage, among the plurality of vane stages, that is not visible from the inlet opening has a second emissivity that is greater than the first emissivity.