Abstract: A reduction projecting aligner preliminary forming an annular illumination light from a laser beam for increasing the illuminance transferred to the reticle and utilizing an annular illumination light that is obliquely incident on a reticle so that a pattern image of the reticle is rapidly printed on a photo-resist layer in high resolution.

Abstract: A magnetic disk drive capable of perfectly preventing dispersion of oil mists of a grease. The magnetic disk drive has a labyrinth seal disposed between a flange and a bushing of a spindle motor, thereby preventing a possible entry of oil mist of the grease applied to bearings into a sealed chamber. The magnetic disk drive further has a magnetic seal disposed between a rotor and a spindle shaft which are located axially opposite to the labyrinth seal relative to a stator. A combination of the labyrinth seal and the magnetic seal ensures improvement of the spindle motor while maintaining a sufficient sealing effect.

Abstract: A breather filter unit for a magnetic disk drive including a base and a cover fixed to the base, the cover having a vent. The breather filter unit includes a casing fixed to an inner surface of the cover, the casing having a vent inlet communicating with the vent of the cover and a vent outlet communicating with an inside of the magnetic disk drive, and a first filter contained in the casing at a position adjacent to the vent inlet, the first filter being formed from a plurality of fibers extending in a direction substantially parallel to that of an air flow from the vent inlet to the vent outlet. The breather filter unit further includes a second filter bonded to the casing so as to cover the vent outlet, and an activated carbon layer contained in the casing at a position between the first filter and the second filter.

Abstract: A magnetic disk drive having one or more magnetic disks, one or more read/write heads each recording or reproducing information for a corresponding one of the magnetic disks, a servo head reading control information from a predetermined one of the magnetic disks, and an actuator supporting the one or more read/write heads and the servo head includes first leads extending from the one or more read/write heads along one side of the actuator, and second leads extending from the servo head along the other side of the actuator so that the second leads can be distanced in space from the first leads.