Abstract: According to one embodiment, a pattern forming methoo is disclosed. A film is formed on a substrate to be processed. A gaps is formed in a surface of the film. A photo-curable imprinting agent is supplied on the film surface in which the gaps are formed. The agent is contacted with a template including a concave pattern. The contacting is configured to fill the concave pattern with the agent. Light is applied to the agent while the agent is contacted with the template, wherein the agent is cured by the light. The template is separated from the substrate, wherein a pattern of the cured agent is formed on the substrate.

Abstract: The heat sink has a first heat transfer plate member that has one surface thermally connected to a heat generating component and is thermally connected to a first heat dissipating fin section having thin plate fins; a second heat transfer plate member that has one surface thermally connected to a second heat dissipating fin section having thin plate fins; a heat pipe section that is provided between an opposite surface of the first heat transfer plate member and an opposite surface of the second heat transfer plate member to be thermally connected thereto; and a heat transfer block that is thermally connected to a side surface and an upper surface of the heat pipe section and arranged to sandwich the heat pipe section between the heat transfer block and the second heat transfer plate member.

Abstract: A template for imprinting in which a pattern is transferred onto a first substrate applied curable resin thereon, including a second substrate having a surface to be contacted with the curable resin, a concave portion provided on the surface and corresponding to a pattern to be transferred onto the first substrate, and at least one convex portion arranged in the concave portion to decrease volume of

Abstract: A sheet folding apparatus for performing folding processing on a sheet from a carry-in entrance to carry out to a carrying-out exit has a sheet feeding apparatus, a first transport path, a second transport path, and a folding processing device. The sheet feeding apparatus includes a transport roller pair in press-contact with each other, a gate stopper device having a stopper member, a register area to curve and deform the sheet with the front end regulated, and a stopper driving device for shifting the gate stopper device. The stopper member is formed so that a shift trajectory of the regulation surface is to guide the front end of the sheet to the press-contact portion of the transport roller pair. The first transport path is provided with the sheet feeding apparatus for aligning a front end of the sheet fed from the carry-in entrance to feed to a predetermined processing position.

Abstract: A vehicle drive device has an engine, a transmission, a clutch device and a clutch operating mechanism which operates the clutch device to drivingly connect the engine to the transmission. The clutch operating mechanism has a clutch drum secured to the outer circumferential surface of an input shaft of the transmission and holding a second clutch section which is engageable with a first clutch section held on an input member of the clutch device to which a driving power of the engine is transmitted. The clutch drum has a drum chamber, a fixed plate closing an opening of the drum chamber, a piston surrounded by the clutch drum and partitioning the drum chamber into a hydraulic chamber and a spring chamber, and an urging element provided inside the spring chamber to be surrounded by the clutch drum and urging the piston.

Abstract: Provided is a method of forming a resist pattern capable of forming a resist pattern, whose dimensional variations and defects are reduced as far as possible, with a high throughput. The invention provides a method of forming a resist pattern involving the following: forming a resist film on a substrate; subjecting the resist film to exposure treatment in a pressure-reduced condition after performing pressure-reducing treatment; performing reduced-pressure releasing treatment that releases the resist film from a pressure-reduced condition while humidifying the resist film by introducing a humidity-adjusted gas into the pressure-reduced environment; performing bake treatment that heats the resist film after the reduced-pressure releasing treatment; and developing the resist film.

Abstract: A template having a first recess pattern is brought into contact with a mask material formed on a substrate. The mask material with which the first recess pattern is filled is cured. A mask material pattern is formed on the substrate by releasing the template from the mask material. A resist pattern is formed to cover a part of the mask material pattern by forming a resist on the mask material pattern and selectively irradiating radiation onto the resist and thereafter developing the resist. The substrate is processed by using the mask material pattern and the resist pattern as a mask.

Abstract: A drive system for a vehicle includes an engine, a transmission, a clutch mechanism including first and second clutch portions, the clutch mechanism being switchable between connected and disconnected states, and a clutch operation mechanism switching the clutch mechanism between the connected and disconnected states, the clutch operation mechanism including a clutch drum forming a drum chamber, a piston dividing the drum chamber into a spring chamber and a pressurizing chamber, a control valve, a biasing member arranged in the spring chamber and exerting a biasing force in a direction in which the first and second clutch portions are engaged with each other, and a bore formed in the clutch drum, the bore discharging oil of the spring chamber to an outer side of the spring chamber in a state where a counteracting force against a centrifugal force acting in the pressurizing chamber is generated in the spring chamber.

Abstract: Provided is a heat sink capable of improving heat dissipating characteristics and saving space with a reduced fin size. The heat sink is provided with: a base plate which has one surface thermally connected to a heat generating component and which has thermally connected thereto a first heat dissipating fin section composed of a thin plate fin; an upper plate which has a second heat dissipating fin section thermally connected on one surface, the second heat dissipating fin section being composed of two kinds of thin plate fins having different heights; and a plurality of heat pipes which are disposed between the other surface of the base plate and the other surface of the upper plate by being thermally connected to the surfaces and which include a heat pipe that has at least a part thereof inserted into a part of the second heat dissipating fin section.

Abstract: According to one embodiment, a paper discharge device includes a discharged-sheet receiving part that can be opened and closed on a side surface of an apparatus body, is closed on the side surface and receives a recording medium dropped from above along the side surface after image formation.

Abstract: An immersion supporting plate cleaning method of cleaning an immersion supporting plate provided around a substrate to be processed in immersion exposure. An immersion boundary between an immersion area contact part and an immersion area noncontact part on the immersion supporting plate formed when an immersion area is moved according to a predetermined exposure area and an exposure map is determined in advance. Then, the immersion supporting plate is cleaned while a cleaning jig is being moved along the determined immersion boundary.

Abstract: A method for manufacturing a semiconductor device includes: performing modifying a surface of a semiconductor wafer including a silanol group on the surface with an alkylsilyl group; and fluorinating an alkyl group of the alkylsilyl group with which the surface was modified.

Abstract: There is provided a vehicle AC generator in which the contact face of at least one of a pair of cases that make contact with the respective axis-direction end faces of a stator core is provided with a cooling air path that connects the outer circumferential surface of a coil end portion with the outer circumferential surface of the stator core and has an opening in the axis direction at the outer circumferential surface of the stator core so that the coolability of the coil end portions of the stator coil is raised, and the amount of cooling air is increased so that the overall coolability of the AC generator is improved.

Abstract: According to one embodiment, an imprint template includes a base substrate and a resin-based pattern transfer portion. The pattern transfer portion is formed on a major surface of the base substrate and includes a protrusion-depression pattern. A shape of the protrusion-depression pattern is transferred to a transfer target. The protrusion-depression portion is provided at the major surface of the base substrate. A major surface side of the pattern transfer portion is provided so as to fit into a depression of the protrusion-depression portion. In another embodiment, a pattern formation method is disclosed. The method can include providing the transfer target on the substrate, and using the imprint template to bring the pattern into contact with the transfer target. In addition, the method can include curing the transfer target and then releasing the imprint template from the transfer target to transfer the shape of the pattern to the transfer target.

Abstract: To enable a sheet to be folded in an accurate position with a simplified folding mechanism in performing folding processing on the sheet with a pair of folding rollers, a second transport path is disposed in a direction for crossing a first transport path for guiding a sheet from a carry-in portion to a carrying-out portion, and in the cross portion are disposed a folding roller pair for performing folding processing on a sheet, and a folding deflecting member for inserting a fold of the sheet in the nip portion. Then, the folding deflecting member is comprised of a driven roller that comes into press-contact with a roller periphery of the folding roller pair, and a shift member for shifting the driven roller from a waiting position to an actuation position, and by the operation of shifting the driven roller from the waiting position outside the path to the actuation position, the sheet front end portion is fed to the nip portion from an upstream-side guide path formed in the second transport path.

Abstract: A method for evaluating chemical solution includes determining number of particles in liquid for each size of the particles by measurement, expressing a relationship between size of the particles and number of particles corresponding to the size by a function based on the number of particles for each size of the particles determined by the measurement, and evaluating influence of particles having size less than or equal to a measurement limit in the liquid based on the function.

Abstract: There is disclosed a film forming method comprising continuously discharging a solution adjusted so as to spread over a substrate by a given amount to the substrate through a discharge port disposed in a nozzle, moving the nozzle and substrate with respect to each other, and holding the supplied solution onto the substrate to form a liquid film, wherein a distance h between the discharge port of the nozzle and the substrate is set to be not less than 2 mm and to be in a range less than 5×10?5 q? (mm) given with respect to a surface tension ? (N/m) of the solution, discharge speed q (m/sec) of the solution continuously discharged through the discharge port, and a constant of 5×10?5 (m·sec/N).