Abstract: A robot system includes: a robotic hand configured to load and unload a workpiece into and from a cassette in which a plurality of workpieces are aligned in a first direction; a sensor configured to detect the workpiece; a transporter configured to change a relative position of the sensor with respect to the cassette in the first direction and in a second direction; and circuitry configured to: control the transporter to arrange the sensor at a first position; command the sensor to scan in the first direction, to acquire first mapping data; control the transporter to arrange the sensor at a second position by changing the relative position of the sensor in the second direction; command the sensor to scan in the first direction, to acquire second mapping data; and determine that one or more of the workpieces are inclined based on the first and second mapping data.

Abstract: A robot system includes: a robotic hand configured to load and unload a workpiece into and from a cassette in which a plurality of workpieces are aligned in a first direction; a sensor configured to detect the workpiece; a transporter configured to change a relative position of the sensor with respect to the cassette in the first direction and in a second direction; and circuitry configured to: control the transporter to arrange the sensor at a first position; command the sensor to scan in the first direction, to acquire first mapping data; control the transporter to arrange the sensor at a second position by changing the relative position of the sensor in the second direction; command the sensor to scan in the first direction, to acquire second mapping data; and determine that one or more of the workpieces are inclined based on the first and second mapping data.

Abstract: A teaching jig includes a body portion and at least three light emitting units installed on the body portion. In the teaching jig, all the light emitting units are positioned, when the body portion is located at a target position of the teaching jig with respect to a measurement member and is seen over the measurement member, in the vicinity of a peripheral edge of the measurement member and at only one of the inside and the outside of the peripheral edge of the measurement member.

Abstract: A robotic system includes: an arm configured to carry a substrate to a mounting base; a hand disposed at a tip portion of the arm, the hand being configured to hold the substrate when the substrate is carried; a detector disposed on the hand, the detector being configured to detect the substrate; and an acquirer configured to recognize heights of the detector when the substrate is detected at a first position and a second position by the detector as heights of the substrate at respective positions and acquire a mounted-state of the substrate mounted on the mounting base based on the height of the substrate at the first position and the height of the substrate at the second position.

Abstract: A robot simulator includes an image generator and a display controller. The image generator is configured to generate a three-dimensional robot image representing a movement to be taught to a robot. The display controller is configured to combine a two-dimensional image representing an environment of the robot with the three-dimensional robot image generated by the image generator so as to obtain a combined image, and configured to control a display to display the combined image.

Abstract: A transfer system according to an embodiment includes a robot and a determination unit. The robot includes robot hands that hold a workpiece in a thin plate shape and that are located at different heights. The determination unit determines the robot hands that hold the workpiece based on a combination of temperature of the workpiece to be held by each of the robot hands.

Abstract: A transfer system includes a substrate positioning device, robots having a first robot and a second robot; and robot control devices, the robot control devices including a first robot control device to which the first robot and the substrate positioning device are connected and a second robot control device to which the second robot is connected. The first robot control device includes an acquiring unit configured to acquire, from the substrate positioning device, at least an absolute deviation amount between the rotation center of the mounting table and a center position of the substrate positioned, and a transmitting unit configured to transmit correction information relying on the absolute deviation amount acquired by the acquiring unit, to the second robot control device to which the second robot is connected.

Abstract: A substrate positioning device includes: a supporting unit for supporting a substrate in place; a light emitting unit and a light receiving unit respectively arranged at major surface sides of the substrate to face each other; a light emission control unit configured to control a light emission quantity of the light emitting unit pursuant to a control value; and a detecting unit for detecting a light reception quantity received by the light receiving unit. The substrate positioning device further includes an adjusting unit for controlling the control value pursuant to the light reception quantity while the substrate is not supported by the supporting unit.

Abstract: A transfer system according to an embodiment includes a robot and a determination unit. The robot includes robot hands that hold a workpiece in a thin plate shape and that are located at different heights. The determination unit determines the robot hands that hold the workpiece based on a combination of temperature of the workpiece to be held by each of the robot hands.

Abstract: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum OT and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

Abstract: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum 0T and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

Abstract: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum OT and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

Abstract: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum 0T and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

Abstract: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum OT and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

Abstract: An optical recording medium including a plurality of recording layers to record/reproduce information using light with a predetermined wavelength, the information being recorded on one of the recording layers using a mark and a space, wherein a channel clock period T is provided for recording the mark on one of the recording layers. A plurality of pulses, including a last pulse arranged at an end of the pulses, are used to record the mark with length 3T, the mark being recorded with a condition that a width of the last pulse is minimum 0T and maximum 1.10T, in which a first subsequent level lower than a peak power level of the last pulse is arranged next to the last pulse, and a second subsequent level lower than the peak power level but higher than the first subsequent level is arranged next to the first subsequent level.

Abstract: According to one embodiment, an information recording medium has a plurality of recording layers, and records and reproduces information by using a semiconductor layer of 450 nm or less. When reproducing information, letting x be the frequency of repetitive recording of a shortest mark length and shortest space length of the information, the ratio of the value of a highest level to the value of a level at x/190 of a sum signal detected within the frequency range of x/3240 to x/190 is lower than 32 dB, or the ratio of the average value of the amplitudes of signals of repetitive recording of the shortest mark length and shortest space length to the value of the highest level within the frequency range of x/3240 to x/190 is higher than 10 dB.

Abstract: According to one embodiment, an information recording medium has a plurality of recording layers, and records and reproduces information by using a semiconductor layer of 450 nm or less. When reproducing information, letting x be the frequency of repetitive recording of a shortest mark length and shortest space length of the information, the ratio of the value of a highest level to the value of a level at x/190 of a sum signal detected within the frequency range of x/3240 to x/190 is lower than 32 dB, or the ratio of the average value of the amplitudes of signals of repetitive recording of the shortest mark length and shortest space length to the value of the highest level within the frequency range of x/3240 to x/190 is higher than 10 dB.

Abstract: A wafer pre-alignment apparatus according to this invention includes a wafer rotating member, a rotation detecting member, a light emitting member for emitting light toward the periphery of the wafer, a COD linear sensor linearly arranged and signal processing member for detecting the edge position of the wafer to acquire at least one of an orientation flat position, notch position and center position of the wafer on the basis of the edge position detected, and further includes an up-down counter for converting a signal received from the rotation detecting member into rotating position information, a measured angle setting register for storing the rotation position information when the wafer rotating member rotates by an interval angle and a comparator for comparing a set value in the measured angle setting register and a counted value in the up-down counter.

Abstract: A prealignment sensor comprising a frame fixed to a base and having a U-shape when viewed from its side. A light source is attached to a lower part of the flame. A convex lens is attached to a lower part of an inside of the frame by which diffused light of the light source is transformed into parallel light. A lens holder is provided for fixing the convex lens to the frame. An optical receiver is attached to an upper part of an inside of the frame by which the parallel light is received and is transformed into an electrical signal. A signal processing circuit is attached to the frame by which the electric signal is transformed into a desired displacement magnitude. The frame is formed of aluminum subjected to sulfuric-acid hard alumite treatment and then to steam sealing.

Abstract: A wafer prealignment apparatus comprising a CCD linear sensor and a wafer prealignment method which facilitate the sensing of wafer presence, improvement in precision of position sensing, and edge sensing adapted to the material of the wafer even of the material is transparent or not. A photodiode (27) is provided in a vicinity of the first pixel from the center shaft of the wafer rotation means of a CCD linear sensor (5) to detect a wafer (1) on the basis of the luminous energy value. The time from the issuance of a measurement command to the sensor (5) to that of an ROG signal for transmitting the detection timing of the sensor (5) is measured to correct the angular error of a measurement position due to the rotation during this measurement. For sensing an edge position of the wafer (1), the scan start point of the sensor (5) is set on the opposite side of the center shaft of the wafer rotation means. When the wafer is transparent a sense signal is binarized to set its change point as the edge position.