Abstract: In a method of detecting a workpiece alignment mark for positioning a mask and a workpiece or in an exposure apparatus, a control unit detects a pattern whose positional relationship is determined with respect to the workpiece mark at a low magnification. The pattern is larger than the workpiece mark, and/or the pattern has a high contrast to include a large amount information (a search mark). When the magnification of the microscope is switched to a high magnification, the workpiece is moved to a position where the workpiece mark is within a view of the microscope, according to the positional relationship. Subsequently, the workpiece mark position is detected at the high magnification.

Abstract: A multistage gear-rolling apparatus of the present invention comprises a roller squeezing apparatus including a roughing roller die and a finishing roller die disposed coaxially and connected in series in an axial direction of said roughing roller die. The roughing roller die is used for carrying out a hot rough-rolling step. The finishing roller die is used for a warm finish-rolling step. Thus, immediately after the hot rough-rolling step, the warm finish-rolling step can be carried out without a reset of workpiece.