Abstract: A cleaning method of cleaning a solution treatment apparatus for applying a coating solution onto a substrate, the solution treatment apparatus including a holder holding and rotating the substrate; a coating solution supplier; and an inner cup surrounding the holder from a lateral side and having a peripheral edge side upper surface inclining down outward in a radial direction. The cleaning method includes introducing the cleaning solution to the storage chamber via the introduction hole, discharging the cleaning solution from the discharge port and making the cleaning solution flow down along the peripheral edge side upper surface of the inner cup, thereby cleaning away the coating solution adhering to the peripheral edge side upper surface. The discharging in the cleaning discharges the cleaning solution from discharge ports of the inner cup outward in the radial direction and obliquely upward.

Abstract: The motor structure, which has a laminated structure of plural plates 1 and also has a stator pole assembly 10 formed with a component mounting portion, comprises a synthetic resin layer 6 which encloses and covers the plural plates 1 while holding the plates in a closely contacted state, overhang portions (8, 9) integral with the synthetic resin layer 6 and which serve to not only hold but also position motor components, and an insulating film 7′ which covers portions not coated with the synthetic resin. While the synthetic resin layer is formed on the surface of the lamination stack, pressure is applied to the laminated plates as constituents of the stator pole assembly from both upper and lower surfaces of the laminate. This application of pressure is performed using plate pressing projections formed in the mold.

Abstract: The motor structure, which has a laminated structure of plural plates 1 and also has a stator pole assembly 10 formed with a component mounting portion, comprises a synthetic resin layer 6 which encloses and covers the plural plates 1 while holding the plates in a closely contacted state, overhang portions (8, 9) integral with the synthetic resin layer 6 and which serve to not only hold but also position motor components, and an insulating film 7′ which covers portions not coated with the synthetic resin. While the synthetic resin layer is formed on the surface of the lamination stack, pressure is applied to the laminated plates as constituents of the stator pole assembly from both upper and lower surfaces of the laminate. This application of pressure is performed using plate pressing projections formed in the mold.

Abstract: A stator pole assembly for a motor comprising a plurality of laminated plates, a synthetic resin layer that encloses and covers the plates while holding the plates in a closely contacted state, portions formed integrally with the synthetic resin layer for holding and positioning motor components and an insulating film that covers portions not coated with the synthetic resin. While the synthetic resin layer is formed on the surface of the lamination stack, pressure is applied to the laminated plates of the stator pole assembly from both upper and lower surfaces of the laminate. This application of pressure is performed using plate pressing projections formed in the mold.

Abstract: An inexpensive conveying system using a linear motor permits accurate stop positioning and controls generation of dust. The conveying system has a unit including a passive moving assembly and a plurality of sets of fixed coils to perform sending, non-energization travel, receiving, and positioning. The conveying and positioning unit is formed by the passive moving assembly composed of a permanent magnet and a linear sensor scale, and a fixed assembly having coils opposed to the moving assembly and sending and receiving sensor heads for detecting the position of the liner scale of the moving assembly. To achieve lower cost, the coils of the fixed assembly are provided only at a sending station and a receiving station, no additional coil being disposed therebetween.