Abstract: A solenoid valve has a tapered valve seat disposed between a first flow passage and a second flow passage, a reduced diameter side of the valve seat that is connected with the first flow passage, and a valve body having a closing portion that reduces its diameter toward a tip facing the valve seat. The first flow passage and the second flow passage are connected/disconnected by sliding the valve body for contacting/detaching the closing portion to the valve seat, and a groove is disposed on the closing portion facing the direction of a fluid flow.

Abstract: A solenoid valve has a tapered valve seat disposed between a first flow passage and a second flow passage, a reduced diameter side of the valve seat that is connected with the first flow passage, and a valve body having a closing portion that reduces its diameter toward a tip facing the valve seat. The first flow passage and the second flow passage are connected/disconnected by sliding the valve body for contacting/detaching the closing portion to the valve seat, and a groove is disposed on the closing portion facing the direction of a fluid flow.

Abstract: A projection is provided in a flange of a resin spool, and a concave portion is provided in a yoke in a position facing the projection. The movement of the spool in the radial direction of the spool is restricted by inserting the projection into the concave portion. Because the inner circumferential surface of the concave portion and the outer circumferential surface of the projection are brought into contact, the movement of the spool in the axial direction of the spool is inhibited by frictional resistance at the points of contact.

Abstract: A stopper formed of a magnetic material and forming a portion of a magnetic circuit has a deformable portion that deforms in accordance with the pressure in a space within a sleeve. The deformable portion is provided with a pressure sensor that measures the amount of deformation of the deformable portion. The deformable portion, corresponding to a diaphragm, is formed in the stopper, which is a conventional electromagnetic valve component part. Therefore, it is no longer necessary to provide a diaphragm or a seal member.

Abstract: The present invention provides a spin cleaning and drying apparatus of single-wafer processing type which cleans a substrate with a cleaning liquid from a rinse nozzle while rotating the substrate and dries the substrate after cleaning while rotating the substrate, comprising: a spin chuck which holds and rotates the substrates; a cup which has an opening on an upper side, a water discharge port and an exhaust gas port in a bottom portion, and encloses the spin chuck; a flow regulating plate which has a gas injection port in a middle and is provided so as to be able to move backward and forward to a position opposed to the substrate and spaced therefrom at a prescribed distance and to an upward or sideward retracted position; and an exhaust cover, having multiple slit holes each with a hood which opens to an upper surface, is provided below the spin chuck.

Abstract: A projection is provided in a flange of a resin spool, and a concave portion is provided in a yoke in a position facing the projection. The movement of the spool in the radial direction of the spool is restricted by inserting the projection into the concave portion. Because the inner circumferential surface of the concave portion and the outer circumferential surface of the projection are brought into contact, the movement of the spool in the axial direction of the spool is inhibited by frictional resistance at the points of contact.

Abstract: If a pressure sensor is increased in size and therefore the inside diameter of a yoke is increased, a stopper is provided with a large-diameter portion. The large-diameter portion makes it possible to reduce the air gap between the stopper and the yoke and therefore suppress an increase in magnetic resistance. Besides, a magnetic circuit member is provided at an outer peripheral side of a sleeve. The magnetic circuit member makes it possible to reduce the air gap between the yoke and an armature and therefore suppress an increase in magnetic resistance.

Abstract: The present invention provides a spin cleaning and drying apparatus of single-wafer processing type which cleans a substrate with a cleaning liquid from a rinse nozzle while rotating the substrate and dries the substrate after cleaning while rotating the substrate, comprising: a spin chuck which holds and rotates the substrates; a cup which has an opening on an upper side, a water discharge port and an exhaust gas port in a bottom portion, and encloses the spin chuck; a flow regulating plate which has a gas injection port in a middle and is provided so as to be able to move backward and forward to a position opposed to the substrate and spaced therefrom at a prescribed distance and to an upward or sideward retracted position; and an exhaust cover, having multiple slit holes each with a hood which opens to an upper surface, is provided below the spin chuck.

Abstract: If a pressure sensor is increased in size and therefore the inside diameter of a yoke is increased, a stopper is provided with a large-diameter portion. The large-diameter portion makes it possible to reduce the air gap between the stopper and the yoke and therefore suppress an increase in magnetic resistance. Besides, a magnetic circuit member is provided at an outer peripheral side of a sleeve. The magnetic circuit member makes it possible to reduce the air gap between the yoke and an armature and therefore suppress an increase in magnetic resistance.

Abstract: A stopper formed of a magnetic material and forming a portion of a magnetic circuit has a deformable portion that deforms in accordance with the pressure in a space within a sleeve. The deformable portion is provided with a pressure sensor that measures the amount of deformation of the deformable portion. The deformable portion, corresponding to a diaphragm, is formed in the stopper, which is a conventional electromagnetic valve component part. Therefore, it is no longer necessary to provide a diaphragm or a seal member.

Abstract: An electromagnetic valve has a plunger as an armature of an electromagnetic actuator and a ball as a movable valve member. The plunger and the ball are separated to permit the ball to move freely in response to a pressure difference between an inlet and an outlet when the coil attracts the plunger. If the plunger undesirably moves by a pressure difference between both ends of the plunger, the ball can keep a closing condition during a suction pressure that is higher than a pressure in the inlet. Therefore, an undesired communication between a master reservoir and a pump is avoided.