Abstract: In an electrochemical gas sensor (10), a first sensing element (21) is stored in a first storage portion (31). A moisture permeable film (24) is disposed in a first introduction inlet (31A) of the first storage portion (31). The moisture permeable film (24) substantially prevents a to-be-detected gas from permeating therethrough. A second sensing element (22) is disposed in a space into which water vapor and the to-be-detected gas contained in a target gas flow. In such a configuration, the electrochemical gas sensor (10) is capable of detecting a to-be-detected gas having a concentration of 0 or more and 1 ppm or less.

Abstract: An ozone generator (100) includes: a flow path (1) through which gas flows from an inlet (5) to an outlet (6); an ozone generation unit (3) disposed in the flow path (1); and an ozone sensor (4) disposed in the flow path (1) and upstream of the ozone generation unit (3). The flow path (1) has an upstream-side flow path (130) that forms a gas passing space (AR) located upstream of the ozone generation unit (3) and through which the gas flows from one side to another side in a predetermined direction. The inlet (5) is disposed closer to an outer circumferential portion (131) of the upstream-side flow path (130) than the ozone sensor (4).

Abstract: A gas sensor including a plate-shaped base substrate and three or more mixed-potential-type sensor elements disposed at predetermined intervals on a main face of the base substrate and electrically connected in series. A single heat generation resistor for heating the mixed-potential-type sensor elements and a temperature sensor for measuring the temperature of the base substrate are embedded in the base substrate or disposed on a face of the base substrate opposite the main face. The heat generation resistor has a pattern which overlaps the mixed-potential-type sensor elements, and the maximum value of temperature differences among the mixed-potential-type sensor elements, produced as a result of energization and control of the mixed-potential-type sensor elements to a target temperature using the temperature sensor, falls within 5% of the target temperature.

Abstract: Between a gas sensing layer (4) and a base member (15) composed of a silicon substrate (2) and an insulating coat layer (3), there is formed an adhesion layer 7, to improve the adhesion therebetween, and to prevent separation. The gas sensing layer (4) and sensing electrodes (6) are electrically connected by abutment of a confronting surface (61) of sensing electrodes (6) confronting the gas sensing layer (4) and sides surfaces of the sensing electrodes on both sides, on the gas sensing layer (4), and accordingly the gas sensor properly senses an electric characteristic of the gas sensing layer (4) varied in accordance with a concentration variation of a specified gas. Furthermore, the sensing electrodes (6) are in contact with the gas sensing layer (4), but the sensing electrodes are not in contact with the adhesion layer (7).

Abstract: Between a gas sensing layer (4) and a base member (15) composed of a silicon substrate (2) and an insulating coat layer (3), there is formed an adhesion layer 7, to improve the adhesion therebetween, and to prevent separation. The gas sensing layer (4) and sensing electrodes (6) are electrically connected by abutment of a confronting surface (61) of sensing electrodes (6) confronting the gas sensing layer (4) and sides surfaces of the sensing electrodes on both sides, on the gas sensing layer (4), and accordingly the gas sensor properly senses an electric characteristic of the gas sensing layer (4) varied in accordance with a concentration variation of a specified gas. Furthermore, the sensing electrodes (6) are in contact with the gas sensing layer (4), but the sensing electrodes are not in contact with the adhesion layer (7).