Patents by Inventor Shinichiro NOZAKI

Shinichiro NOZAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11962122
    Abstract: A semiconductor light emitting device includes: a semiconductor light emitting element including a substrate and a plurality of light emitters arranged along an upper surface of the substrate; a first base disposed below a lower surface of the substrate; and a first bonding layer which bonds the semiconductor light emitting element to the first base. In the semiconductor light emitting device, a thermal conductivity of the substrate is higher than a thermal conductivity of the first bonding layer, and a thickness of the first bonding layer is less on one end side than on an other end side in an arrangement direction in which the plurality of light emitters are arranged.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: April 16, 2024
    Assignee: PANASONIC HOLDINGS CORPORATION
    Inventors: Hiroyuki Hagino, Shinichiro Nozaki
  • Publication number: 20230155346
    Abstract: Semiconductor light emitting device includes semiconductor light emitting element and submount that includes mounting surface, semiconductor light emitting element includes: semiconductor multilayer structure that includes opposite surface opposite mounting surface and emission surface; and mounting electrode that is arranged on opposite surface and extends in a direction of emission of light, emission surface is located outside of an end portion of mounting surface, groove is formed in opposite surface of semiconductor multilayer structure to extend along mounting electrode in the direction of emission, and a first distance between emission surface and groove is greater than zero and less than a second distance between emission surface and mounting surface.
    Type: Application
    Filed: January 19, 2023
    Publication date: May 18, 2023
    Inventor: Shinichiro NOZAKI
  • Patent number: 11637008
    Abstract: A plasma lamp for use in a broadband plasma source of an inspection tool is disclosed. The plasma lamp includes a plasma bulb configured to contain a gas and generate a plasma within the plasma bulb. The plasma bulb is formed from a material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma. The plasma bulb includes a conical pocket. The conical pocket is configured to disrupt a plume rising from the plasma.
    Type: Grant
    Filed: August 18, 2022
    Date of Patent: April 25, 2023
    Assignees: KLA CORPORATION, USHIO, INC.
    Inventors: Sumeet Kumar, Joshua Wittenberg, Mark S. Wang, Rajkeshar Singh, Yoshio Kagebayashi, Shinichiro Nozaki
  • Publication number: 20230072452
    Abstract: A reflectivity of an end surface protective film of a semiconductor laser element is made less than or equal to 1% in a wide wavelength range. Semiconductor laser element includes semiconductor stack body having front end surface and rear end surface, and end surface protective film disposed on front end surface of semiconductor stack body. End surface protective film includes first dielectric layer disposed on front end surface and second dielectric layer stacked outside first dielectric layer. Second dielectric layer includes first layer stacked on first dielectric layer, second layer stacked on first layer, and third layer stacked on second layer. For wavelength ?, of a laser beam, refractive index n2 of second layer is higher than refractive index n1 of first layer and refractive index n3 of third layer, and a film thickness of second layer ranges from ?(8n2) to 3?(4n2) inclusive.
    Type: Application
    Filed: March 2, 2021
    Publication date: March 9, 2023
    Inventors: ATSUNORI MOCHIDA, SHINICHIRO NOZAKI, MASANORI ERA
  • Publication number: 20220416508
    Abstract: The semiconductor laser element includes: a substrate; a first semiconductor layer disposed above a main surface of the substrate; an active layer that is disposed above the first semiconductor layer and generates light; and a second semiconductor layer) disposed above the active layer. In a top view of a front-side end portion of the semiconductor laser element from which the light is emitted, an end surface of the second semiconductor layer includes an inclined portion with respect to an end surface of the first semiconductor layer.
    Type: Application
    Filed: November 10, 2020
    Publication date: December 29, 2022
    Inventors: Hiroyuki HAGINO, Shinichiro NOZAKI
  • Publication number: 20220360050
    Abstract: A semiconductor light emitting device includes a substrate and a semiconductor multilayer stacked on the substrate. The semiconductor multilayer includes an n-side clad layer stacked above the substrate, an active layer stacked above the n-side clad layer, and a p-side clad layer stacked above the active layer. The semiconductor multilayer includes a first plane perpendicular to a stacking direction in which the semiconductor multilayer is stacked, and a lattice constant inside the first plane is an anisotropy constant.
    Type: Application
    Filed: July 21, 2020
    Publication date: November 10, 2022
    Inventor: Shinichiro NOZAKI
  • Patent number: 11451010
    Abstract: A semiconductor light-emitting element includes: an n-type cladding layer formed of a nitride semiconductor; an active layer which is arranged above the n-type cladding layer and formed of a nitride semiconductor; a p-type cladding layer arranged above the active layer and formed of a nitride semiconductor; and a p-side electrode arranged above the p-type cladding layer, wherein the p-type cladding layer contains hydrogen, and a first concentration of the hydrogen at a center of the p-type cladding layer in a region below the p-side electrode is lower than a second concentration of the hydrogen at a position located on a side closer to an outer edge than to the center in the region below the p-side electrode.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: September 20, 2022
    Assignee: PANASONIC HOLDINGS CORPORATION
    Inventors: Shinichiro Nozaki, Takuma Katayama
  • Publication number: 20220263288
    Abstract: A semiconductor laser device, which outputs laser light, includes: a substrate; an n-type semiconductor layer disposed above the substrate; a light emitting layer disposed above the n-type semiconductor layer; a p-type semiconductor layer disposed above the light emitting layer; and at least one p electrode disposed above the p-type semiconductor layer. At least one groove is formed that extends from an upper surface of the p-type semiconductor layer to reach a lower surface of the light emitting layer, and extends in a resonance direction of the laser light. A remaining length, which is a distance between an output end face from which the laser light is outputted and a portion of each groove that is closest to the at least one p electrode, is longer than a non-injection region length, which is a distance between the output end face and the at least one p electrode.
    Type: Application
    Filed: August 17, 2020
    Publication date: August 18, 2022
    Inventor: Shinichiro NOZAKI
  • Patent number: 11398715
    Abstract: A semiconductor light emitting device includes a substrate, and an array including three or more light emitting elements which are aligned above and along a main surface of a substrate and each emit light. The light emitting elements each include a clad layer of a first conductivity type, an active layer containing In, and a clad layer of a second conductivity type disposed above the substrate sequentially from the substrate. Among the light emitting elements, the compositional ratio of In in the active layer is smaller in the light emitting element located in a central area in an alignment direction than that in the light emitting elements located in both end areas in the alignment direction.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: July 26, 2022
    Assignee: PANASONIC HOLDINGS CORPORATION
    Inventors: Shinichiro Nozaki, Shinichi Takigawa
  • Publication number: 20210296851
    Abstract: A semiconductor light emitting device includes: a semiconductor light emitting element including a substrate and a plurality of light emitters arranged along an upper surface of the substrate; a first base disposed below a lower surface of the substrate; and a first bonding layer which bonds the semiconductor light emitting element to the first base. In the semiconductor light emitting device, a thermal conductivity of the substrate is higher than a thermal conductivity of the first bonding layer, and a thickness of the first bonding layer is less on one end side than on an other end side in an arrangement direction in which the plurality of light emitters are arranged.
    Type: Application
    Filed: July 10, 2019
    Publication date: September 23, 2021
    Inventors: Hiroyuki HAGINO, Shinichiro NOZAKI
  • Publication number: 20210249837
    Abstract: A semiconductor light emitting device includes a mount section having an insulating property connected to a heat sink, a plurality of semiconductor laser elements disposed on the mount section, and a heat radiation block having an insulating property disposed on the plurality of semiconductor laser elements. A first wiring made of a metal is disposed on an upper surface of the mount section, and a second wiring made of a metal is disposed on a lower surface of the heat radiation block, a part of the second wiring being electrically connected to the first wiring. By electrically connecting the first wiring and the second wiring to each of the plurality of semiconductor laser elements, the plurality of semiconductor laser elements are connected in series, and have a same polarity with each other at a side that each of the plurality of semiconductor laser elements is connected to the first wiring.
    Type: Application
    Filed: April 22, 2021
    Publication date: August 12, 2021
    Inventor: Shinichiro NOZAKI
  • Patent number: 11018472
    Abstract: A semiconductor light emitting device includes a mount section having an insulating property connected to a heat sink, a plurality of semiconductor laser elements disposed on the mount section, and a heat radiation block having an insulating property disposed on the plurality of semiconductor laser elements. A first wiring made of a metal is disposed on an upper surface of the mount section, and a second wiring made of a metal is disposed on a lower surface of the heat radiation block, a part of the second wiring being electrically connected to the first wiring. By electrically connecting the first wiring and the second wiring to each of the plurality of semiconductor laser elements, the plurality of semiconductor laser elements are connected in series, and have a same polarity with each other at a side that each of the plurality of semiconductor laser elements is connected to the first wiring.
    Type: Grant
    Filed: January 24, 2020
    Date of Patent: May 25, 2021
    Assignee: PANASONIC CORPORATION
    Inventor: Shinichiro Nozaki
  • Patent number: 10892597
    Abstract: A nitride semiconductor laser includes: a first nitride semiconductor layer; a light-emitting layer formed on the first nitride semiconductor layer and including a nitride semiconductor; a second nitride semiconductor layer formed on the light-emitting layer and having a ridge portion; an electrode component formed on the second nitride semiconductor layer, and which is wider than the ridge portion; and a dielectric layer formed on side surfaces of the ridge portion and including SiO2. A space is present between the electrode component and the dielectric layer, and the electrode component is prevented from being in contact with the dielectric layer by the space, and is in contact with the upper surface of the ridge portion.
    Type: Grant
    Filed: June 28, 2017
    Date of Patent: January 12, 2021
    Assignee: PANASONIC CORPORATION
    Inventors: Hiroyuki Hagino, Osamu Imafuji, Shinichiro Nozaki
  • Publication number: 20200412102
    Abstract: A semiconductor light emitting device includes a substrate, and an array including three or more light emitting elements which are aligned above and along a main surface of a substrate and each emit light. The light emitting elements each include a clad layer of a first conductivity type, an active layer containing In, and a clad layer of a second conductivity type disposed above the substrate sequentially from the substrate. Among the light emitting elements, the compositional ratio of In in the active layer is smaller in the light emitting element located in a central area in an alignment direction than that in the light emitting elements located in both end areas in the alignment direction.
    Type: Application
    Filed: December 19, 2018
    Publication date: December 31, 2020
    Inventors: Shinichiro NOZAKI, Shinichi TAKIGAWA
  • Publication number: 20200227895
    Abstract: Provided is a semiconductor laser element including: a substrate; and a laser array section located above the substrate and having a plurality of light emitting parts which are arranged next to each other and which emit laser beams, wherein when the wavelengths of the laser beams respectively emitted from the plurality of light emitting parts are plotted in correspondence with the positions of the plurality of light emitting parts, among a plurality of points respectively corresponding to the wavelengths plotted, the point with an extreme value is not located at a position corresponding to the center of the laser array section and is located at a position corresponding to a place separated from the center of the laser array section.
    Type: Application
    Filed: July 10, 2018
    Publication date: July 16, 2020
    Inventors: Shinichi TAKIGAWA, Shinichiro NOZAKI
  • Publication number: 20200220331
    Abstract: A semiconductor light-emitting element includes: an n-type cladding layer formed of a nitride semiconductor; an active layer which is arranged above the n-type cladding layer and formed of a nitride semiconductor; a p-type cladding layer arranged above the active layer and formed of a nitride semiconductor; and a p-side electrode arranged above the p-type cladding layer, wherein the p-type cladding layer contains hydrogen, and a first concentration of the hydrogen at a center of the p-type cladding layer in a region below the p-side electrode is lower than a second concentration of the hydrogen at a position located on a side closer to an outer edge than to the center in the region below the p-side electrode.
    Type: Application
    Filed: August 2, 2018
    Publication date: July 9, 2020
    Inventors: Shinichiro NOZAKI, Takuma KATAYAMA
  • Publication number: 20200185879
    Abstract: A semiconductor light emitting device includes a mount section having an insulating property connected to a heat sink, a plurality of semiconductor laser elements disposed on the mount section, and a heat radiation block having an insulating property disposed on the plurality of semiconductor laser elements. A first wiring made of a metal is disposed on an upper surface of the mount section, and a second wiring made of a metal is disposed on a lower surface of the heat radiation block, a part of the second wiring being electrically connected to the first wiring. By electrically connecting the first wiring and the second wiring to each of the plurality of semiconductor laser elements, the plurality of semiconductor laser elements are connected in series, and have a same polarity with each other at a side that each of the plurality of semiconductor laser elements is connected to the first wiring.
    Type: Application
    Filed: January 24, 2020
    Publication date: June 11, 2020
    Inventor: Shinichiro NOZAKI
  • Patent number: 10581218
    Abstract: A semiconductor light emitting device includes a mount section having an insulating property connected to a heat sink, a plurality of semiconductor laser elements disposed on the mount section, and a heat radiation block having an insulating property disposed on the plurality of semiconductor laser elements. A first wiring made of a metal is disposed on an upper surface of the mount section, and a second wiring made of a metal is disposed on a lower surface of the heat radiation block, a part of the second wiring being electrically connected to the first wiring. By electrically connecting the first wiring and the second wiring to each of the plurality of semiconductor laser elements, the plurality of semiconductor laser elements are connected in series, and have a same polarity with each other at a side that each of the plurality of semiconductor laser elements is connected to the first wiring.
    Type: Grant
    Filed: May 22, 2018
    Date of Patent: March 3, 2020
    Assignee: Panasonic Corporation
    Inventor: Shinichiro Nozaki
  • Publication number: 20190245322
    Abstract: A nitride semiconductor laser includes: a first nitride semiconductor layer; a light-emitting layer formed on the first nitride semiconductor layer and including a nitride semiconductor; a second nitride semiconductor layer formed on the light-emitting layer and having a ridge portion; an electrode component formed on the second nitride semiconductor layer, and which is wider than the ridge portion; and a dielectric layer formed on side surfaces of the ridge portion and including SiO2. A space is present between the electrode component and the dielectric layer, and the electrode component is prevented from being in contact with the dielectric layer by the space, and is in contact with the upper surface of the ridge portion.
    Type: Application
    Filed: June 28, 2017
    Publication date: August 8, 2019
    Inventors: Hiroyuki HAGINO, Osamu IMAFUJI, Shinichiro NOZAKI
  • Publication number: 20190021158
    Abstract: A laser-driven light source device includes a laser oscillation unit configured to emit laser light, and a plasma vessel configured to contain and seal a discharge medium therein. The laser-driven light source device also includes an optical system configured to condense the laser light emitted from the laser oscillation unit, and direct the laser light to an inside of the plasma vessel to generate a plasma. The laser oscillation unit includes a control unit configured to perform an on/off control on the generation of the laser light to modulate an output of the laser light such that the laser light is generated during an on-time of several ?sec to several msec and the laser light is not generated during an off-time. The off-time is decided such that the plasma in the plasma vessel does not disappear.
    Type: Application
    Filed: July 10, 2018
    Publication date: January 17, 2019
    Applicant: USHIO DENKI KABUSHIKI KAISHA
    Inventor: Shinichiro NOZAKI