Patents by Inventor Shinichiro Yoshihara

Shinichiro Yoshihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240120217
    Abstract: A substrate treatment method includes: performing a first heat treatment on a substrate on which a coating film of a metal-containing resist has been formed and subjected to an exposure treatment, to form the metal-containing resist into a precursor in an exposed region of the coating film; thereafter, performing a second heat treatment on the substrate to condense the metal-containing resist formed into the precursor in the exposed region of the coating film; and thereafter, performing a developing treatment on the substrate.
    Type: Application
    Filed: September 25, 2023
    Publication date: April 11, 2024
    Inventors: Shinichiro KAWAKAMI, Kosuke YOSHIHARA, Satoru SHIMURA, Yuhei KUWAHARA, Tomoya ONITSUKA, Soichiro OKADA, Tetsunari FURUSHO
  • Patent number: D815261
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: April 10, 2018
    Assignee: Lixil Corporation
    Inventor: Shinichiro Yoshihara
  • Patent number: D838351
    Type: Grant
    Filed: May 31, 2017
    Date of Patent: January 15, 2019
    Assignee: LIXIL CORPORATION
    Inventor: Shinichiro Yoshihara
  • Patent number: D840000
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: February 5, 2019
    Assignee: LIXIL CORPORATION
    Inventor: Shinichiro Yoshihara