Abstract: An exposure apparatus includes a droplet supplier to supply a target droplet inside a vacuum chamber, an irradiator irradiating a pulsed laser onto the target droplet, a condensing mirror installed inside the vacuum chamber and configured to condense a light emitted from the target droplet by irradiation of the pulsed laser onto the target droplet, a gas supplier to flow a hydrogen gas along a surface of the condensing mirror, a controller to change a supply condition of the target droplet and an irradiation condition of the pulsed laser to conditions different from conditions during an exposure operation to increase an amount of production of hydrogen radicals in the vacuum chamber, and an exhaust pump to exhaust a gas from an inside of the vacuum chamber.

Abstract: In a rail guided vehicle system, unnecessary slowing down and stopping of a vehicle passing through a divergence point and a merge point is avoided. The rail guided vehicle system comprises a rail 100 including a guidepath wire 600 in a predetermined area including the divergence point and the merge point, and a plurality of vehicles 200 that travel while being supported and guided by the rail.

Abstract: In a rail guided vehicle system, unnecessary slowing down and stopping of a vehicle passing through a divergence point and a merge point is avoided. The rail guided vehicle system comprises a rail 100 including a guidepath wire 600 in a predetermined area including the divergence point and the merge point, and a plurality of vehicles 200 that travel while being supported and guided by the rail.

Abstract: A transporting system includes: a track portion; a plurality of loading platforms, disposed along the track portion, whose positions differ from each other in at least one direction; a plurality of transporting vehicles, each having a travelling device travelling along the track portion and a loading device, for loading transported objects; a first detecting device for detecting a first reference position, of the loading device when a reference transporting vehicle loads the transported object; a second detecting device for detecting a second reference position, of the loading device when each of the other transporting vehicles other than the reference transporting vehicle loads the transported object; and a teaching device for providing information on the position of the loading device with respect to each of the other loading platforms when each of the other transporting vehicles loads the transported object, on the basis of the detected first and second reference positions.

Abstract: A transporting system includes: a track portion; a plurality of loading platforms, disposed along the track portion, whose positions differ from each other in at least one direction; a plurality of transporting vehicles, each having a travelling device travelling along the track portion and a loading device, for loading transported objects; a first detecting device for detecting a first reference position, of the loading device when a reference transporting vehicle loads the transported object; a second detecting device for detecting a second reference position, of the loading device when each of the other transporting vehicles other than the reference transporting vehicle loads the transported object; and a teaching device for providing information on the position of the loading device with respect to each of the other loading platforms when each of the other transporting vehicles loads the transported object, on the basis of the detected first and second reference positions.

Abstract: A foot depressing parking brake apparatus including a brake pedal main body 3 pivotably supported by a support shaft 2, a ratchet plate 4 having ratchet teeth 4b and attached to the brake pedal main body 3, a ratchet pole 6 rotatably attached to a pivot pin 5 and constituting a shaft hole inserted with the pivot pin 5 by a long hole 7, and a toggle spring 10 for exerting a turning force to the ratchet pole 6, wherein a brake operating state in which a claw portion 6a of the ratchet pole 6 is brought in mesh with the ratchet teeth 4b of the ratchet plate 4 and a brake releasing state in which the meshing is released are realized.

Abstract: A foot depressing parking brake apparatus including a brake pedal main body 3 pivotably supported by a support shaft 2, a ratchet plate 4 having ratchet teeth 4b and attached to the brake pedal main body 3, a ratchet pole 6 rotatably attached to a pivot pin 5 and constituting a shaft hole inserted with the pivot pin 5 by a long hole 7, and a toggle spring 10 for exerting a turning force to the ratchet pole 6, wherein a brake operating state in which a claw portion 6a of the ratchet pole 6 is brought in mesh with the ratchet teeth 4b of the ratchet plate 4 and a brake releasing state in which the meshing is released are realized.