Patents by Inventor Shinji Fukuta

Shinji Fukuta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing method of electronic device with resist ashing
    Patent number: 7682983
    Abstract: A manufacturing method of an electronic device, includes the steps of: implanting P (phosphorous) ions into a substrate semiconductor region made of Si or SiGe by using a resist as a mask; ashing the resist while it is heated in a vacuum environment; and taking out the substrate, the substrate being ashing processed so that a temperature of the substrate is equal to or less than 130° C.
    Type: Grant
    Filed: July 17, 2006
    Date of Patent: March 23, 2010
    Assignee: Fujitsu Microelectronics Limited
    Inventors: Hikaru Kokura, Kenji Nukui, Shinji Fukuta, Tadashi Oshima, Fukashi Harada, Tatsuro Kawabata
  • Manufacturing method of electronic device
    Publication number: 20070173066
    Abstract: A manufacturing method of an electronic device, includes the steps of: implanting P (phosphorous) ions into a substrate semiconductor region made of Si or SiGe by using a resist as a mask; ashing the resist while it is heated in a vacuum environment; and taking out the substrate, the substrate being ashing processed so that a temperature of the substrate is equal to or less than 130° C.
    Type: Application
    Filed: July 17, 2006
    Publication date: July 26, 2007
    Applicant: FUJITSU LIMITED
    Inventors: Hikaru Kokura, Kenji Nukui, Shinji Fukuta, Tadashi Oshima, Fukashi Harada, Tatsuro Kawabata
  • Stainless steel product for producing polymer electrode fuel cell
    Patent number: 6379476
    Abstract: The stainless steel product has passive film on the surface, and at least one of a conductive metallic inclusion of carbide and a conductive metallic inclusion of boride protrudes through an outer surface of passive film from stainless steel under the passive film. The stainless steel product has low contact electrical resistance and suitable for use in bipolar plates of a polymer electrode fuel cell.
    Type: Grant
    Filed: April 13, 2000
    Date of Patent: April 30, 2002
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventors: Yoshio Tarutani, Takashi Doi, Akira Seki, Shinji Fukuta