Abstract: A substrate delivery apparatus and a substrate delivery method that can maintain a wet surface of a substrate and transport the substrate between processing devices are provided. A substrate delivery apparatus 2 of the present embodiment includes: a cart housing 210 having a housing room 211 that receives from outside and houses the substrate transportation cart 1 in which a tank 110 containing a plurality of substrates W and water is loaded; and a take-out device 250 that takes the substrate W out from the tank 110 loaded in the substrate transportation cart 1 housed in the housing room 211 and delivers the substrate W to the washing apparatus 3 that is the adjacent processing device.