Patents by Inventor SHINJI NARAHARA

SHINJI NARAHARA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arc evaporation source
    Patent number: 9953808
    Abstract: Provided is an arc evaporation source for melting and evaporating a cathode material by arc discharge for film formation on a surface of a substrate, and including a cathode formed in a substantially disc shape and a magnetic field generating apparatus, disposed at a back side of the cathode. The magnetic field generating apparatus generates a magnetic field which forms magnetic lines that form an acute angle with respect to a substrate direction at an outer circumferential surface of the cathode, magnetic lines that are substantially perpendicular to the discharge surface at an outermost circumference part of the discharge surface of the cathode, and magnetic lines that form an acute angle with respect to a center direction of the cathode at a region towards the outer circumferential surface of the discharge surface of the cathode, by at least one permanent magnet disposed at the back side of the cathode.
    Type: Grant
    Filed: April 30, 2013
    Date of Patent: April 24, 2018
    Assignee: NIPPON ITF, INC.
    Inventors: Naoto Okazaki, Ken Yoshihara, Hiroshi Ishizuka, Tomoyasu Matsuno, Shinji Narahara
  • ARC EVAPORATION SOURCE
    Publication number: 20160086770
    Abstract: Provided is an arc evaporation source for melting and evaporating a cathode material by arc discharge for film formation on a surface of a substrate, and including a cathode formed in a substantially disc shape and a magnetic field generating apparatus, disposed at a back side of the cathode. The magnetic field generating apparatus generates a magnetic field which forms magnetic lines that form an acute angle with respect to a substrate direction at an outer circumferential surface of the cathode, magnetic lines that are substantially perpendicular to the discharge surface at an outermost circumference part of the discharge surface of the cathode, and magnetic lines that form an acute angle with respect to a center direction of the cathode at a region towards the outer circumferential surface of the discharge surface of the cathode, by at least one permanent magnet disposed at the back side of the cathode.
    Type: Application
    Filed: April 30, 2013
    Publication date: March 24, 2016
    Inventors: NAOTO OKAZAKI, KEN YOSHIHARA, HIROSHI ISHIZUKA, TOMOYASU MATSUNO, SHINJI NARAHARA