Abstract: A movable stage device, which has a stationary base, a movable stage and a linear motor, further includes a second linear motor which serves as a second driving device for imparting thrust to the movable stage and which is attached to the movable stage through the intermediation of an attachment plate. Both ends of a row of second drive coils are supported above the floor by support plates, which are independent of the stationary base and directly support the row of second drive coils above the floor in such a manner as to provide high rigidity, thereby attaining an improvement in speed and accuracy of positioning and avoiding a waste of energy.

Abstract: A stage system includes a first stage movable along a reference plane, containing a vertical direction, and in the vertical direction or in a first direction close to the vertical direction, a second stage movable in a second direction intersecting with the first direction and relative to the first stage, a first driving mechanism for moving the first stage in the first direction, a second driving mechanism for moving the second stage in the second direction, a countermass movable in the first direction, and a third driving mechanism for moving the countermass in a direction opposite to the first direction.

Abstract: A movable stage device, which has a stationary base, a movable stage and a linear motor, further includes a second linear motor which serves as a second driving device for imparting thrust to the movable stage and which is attached to the movable stage through the intermediation of an attachment plate. Both ends of a row of second drive coils are supported above the floor by support plates, which are independent of the stationary base and directly support the row of second drive coils above the floor in such a manner as to provide high rigidity, thereby attaining an improvement in speed and accuracy of positioning and avoiding a waste of energy.

Abstract: A pattern transfer system includes a stage device. The system includes a fine-motion driving device for moving a movable stage through a first range, a relatively rough-motion driving device for moving the movable stage through a second range, which has substantially the same extent as the first range, and a transfer device for transferring a pattern onto a substrate placed on the movable stage.

Abstract: A memory access control apparatus, which is employed for a computer system in which an expansion memory can be installed in addition to a standard memory and which controls the access to the memory by one or more signal lines, comprises an identification circuit for reading identification data of the installed expansion memory, a determination circuit for determining the optimal output current values for the signal lines based on the identification data; and a memory controller for adjusting the output current values of the signal lines based on the results obtained by the determination means. Even when multiple types of expansion memories (DIMM cards) whose memory capacities and memory chip arrangements are different are installed, the waveforms and the timings for the output signal lines (RAS, CAS, WE, and MA) of the memory controller can be dynamically compensated for.

Abstract: A stage device includes a first, fine-motion driving system for moving a movable stage through a first range; and a second, relatively rough-motion driving system for moving the movable stage through a second range which is substantially of the same extent as the first range.

Abstract: A positioning table device includes a table, a guide for guiding movement of the table in a predetermined direction, a drive device for moving the table along the predetermined direction, the driving device including a permanent magnet provided on the table and a plurality of coils provided along the predetermined direction, a position detecting device for detecting a position of the table in the predetermined direction, a designating device for designating an energization electric current in accordance with an output of the position detecting device, a coil selector for selecting a coil, of the coils to be energized, in accordance with the position of the table in the predetermined direction, a correcting device for correcting the energization electric current designated by the designating device when the coils to be energized are changed by the coil selecting device, such that a change in coil energization electric current is slowed whereby combined energization electric currents applied to the coils are ma

Abstract: A movable stage device, which has a stationary base, a movable stage and a linear motor, further includes a second linear motor which serves as a second driving device for imparting thrust to the movable stage and which is attached to the movable stage through the intermediation of an attachment plate Both ends of a row of second drive coils are supported above the floor by support plates, which are independent of the stationary base and directly support the row of second drive coils above the floor in such a manner as to provide high rigidity, thereby attaining an improvement in speed and accuracy of positioning and avoiding a waste of energy.

Abstract: A device for positioning control includes a movable stage; an acceleration sensor disposed on the movable table; a feedback loop for controlling movement of the movable table; and an acceleration feedback loop provided in relation to an acceleration signal from the acceleration sensor, wherein the acceleration feedback loop is provided as an internal loop to the feedback loop.

Abstract: A control system for a servomotor, includes a portion for producing a driving speed controlling signal to be applied to the servomotor, a portion for producing a driving amount controlling signal to be applied to the servomotor, and a signal controlling portion for controlling the state of transmission of the driving speed controlling signal and the driving amount controlling signal to the servomotor, the signal controlling portion being effective to establish a first transmission state in which at least the driving speed controlling signal can be transmitted to the servomotor with a predetermined amplification rate and a second transmission state in which the driving speed controlling signal can be transmitted to the servomotor with an amplification rate smaller than said predetermined amplification rate while the driving amount controlling signal can be transmitted to the servomotor with a predetermined amplification rate.