Patents by Inventor Shinji Sakano
Shinji Sakano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6990294Abstract: To ensure transmission in a flexible optical network system, a digital test signal generation/comparison circuit is incorporated in an electrical signal processing portion of a transponder. The optical network system provides transparent wavelength-division multiplex service regardless of the signal type in client optical signals. Prior to connecting a client optical line to the optical system, a selective insertion unit and a selective extraction unit enable quality assessment of the client optical line.Type: GrantFiled: June 28, 2001Date of Patent: January 24, 2006Assignee: Hitachi, LtdInventors: Yoshiaki Ikoma, Masaki Miyagami, Shinji Sakano
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Publication number: 20050243806Abstract: A television phone adapter in which an ordinary analog telephone can switch a telephone with a video function and a telephone without a video function.Type: ApplicationFiled: April 27, 2005Publication date: November 3, 2005Inventors: Shinji Sakano, Kanji Tabeya, Masahito Hirokawa
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Publication number: 20050125090Abstract: A method for predicting a processing result includes a process of performing a principal component analysis on a plurality of detected data obtained during a first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a process of performing a second standard processing; and a process of obtaining a plurality of detected data from a plurality of detectors during the second standard processing. And, the detected data obtained during the second standard processing are applied to the principal component analysis model, to obtain second residuals. The method further includes a process of weighting the second residuals based on weighting references, and constructing a new multivariate analysis model with use of the weighted second residuals; and a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.Type: ApplicationFiled: November 10, 2004Publication date: June 9, 2005Applicant: TOKYO ELECTRON LIMITEDInventors: Shinji Sakano, Satoshi Harada
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Publication number: 20040254761Abstract: In an operation monitoring method according to the present invention, operation data of a plasma processing system (1) are detected for every wafer (W) by means of a plurality of detectors, and a principal component analysis using the operation data is carried out by means of a controller (10). An operation state of the plasma processing system (1) is evaluated by using the results of the principal component analysis.Type: ApplicationFiled: June 20, 2003Publication date: December 16, 2004Inventors: Shinji Sakano, Tsuyoshi Sendoda
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Publication number: 20040213564Abstract: A medium-scale IP telecommunications network is configured in a low-cost optical network with good reliability and expandability. A physical configuration example has a center node 2-1 and eight local nodes 2-11 through 2-18 connected in one OADM ring 2-21/2-22. The logical configuration is a star configuration with the central node 2-1 at its origin with all traffic passing through the center node 2-1. The local nodes 2-11 through 2-18 are connected to the central node 2-1 by wavelength-unit optical channels or optical paths &lgr;1 through &lgr;8. Channels are added as required. Initially, for example, the center node 2-1 and the local node 2-5 are connected by &lgr;5, but &lgr;13 can added when the need arises. Since the logical star network is limited to approximately two add/drop optical channels at local nodes, costs are reduced by using inexpensive filters (e.g.Type: ApplicationFiled: May 26, 2004Publication date: October 28, 2004Inventors: Shinji Sakano, Yasushi Sawada, Hideaki Tsushima, Yoshiaki Ikoma
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Publication number: 20040007560Abstract: There is not known a conventional method for predicting the consumed degree of consumable supplies and the thickness of deposited films without opening a processing chamber.Type: ApplicationFiled: June 11, 2003Publication date: January 15, 2004Inventors: Shinji Sakano, Tsuyoshi Sendoda
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Patent number: 6611638Abstract: In making use of an add/drop multiplexer for demultiplexing or multiplexing signal light of a few specific wavelengths from signal light subjected to optical wavelength multiplexing, a fiber bragg grating is excellent for enhancing rejection of a leakage of a demultiplexed light, but with respect to a high speed optical signal at the demultiplexing or multiplexing, a waveform deterioration occurs. When a dielectric multilayer film filter is used for dealing with the high speed optical signal, a plurality of filters are used to suppress a coherent cross talk, resulting in an increase of loss of pass-through light and an increase of costs.Type: GrantFiled: August 30, 2001Date of Patent: August 26, 2003Assignee: Hitachi, Ltd.Inventor: Shinji Sakano
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Patent number: 6586262Abstract: The present invention is a method for end point detection where emission spectra are detected during etching of an object to be processed, such as a semiconductor wafer, by a spectrometer, and an end point of the etching is detected, comprising performing etching of a sample, corresponding to a product, prior to etching of a semiconductor wafer which is the product, sequentially measuring full-spectra of plasma, performing principal component analysis of the emission spectra using the emission intensities of all wavelengths of each of the full-spectra, holding the results as data, thereafter obtaining a principal component score for each of the full-spectra sequentially measured during etching of a semiconductor wafer to be manufactured on the basis of the emission intensities of all the wavelengths, and then detecting an end point of etching on the basis of a substantial change of the principal component score for each of the full-spectra sequentially measured.Type: GrantFiled: November 16, 2001Date of Patent: July 1, 2003Assignee: Tokyo Electron LimitedInventors: Susumu Saito, Shinji Sakano
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Patent number: 6532103Abstract: A variable attenuator is inserted into an optical input part and a feedback control is performed so that an optical input to an amplifying optical fiber becomes constant. Further, a control for changing a total optical output and an optical input to the amplifying optical fiber is performed on the basis of channel number information obtained from a supervisory signal. When light to/from an intermediate optical component is detected and the absence of the component is detected, pumping is suppressed, thereby avoiding occurrence of an optical surge at the time of connection of the optical component and a signal indicative of detachment of the optical component is generated.Type: GrantFiled: July 26, 2001Date of Patent: March 11, 2003Assignee: Hitachi, Ltd.Inventors: Shinji Sakano, Ichiro Yokota, Junya Kosaka, Takayuki Suzuki
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Publication number: 20020159130Abstract: A wavelength converter and a wavelength division-multiplexing optical communication apparatus automatically generate clock signals of a specified frequency that match send/receive digital signals and regenerates timing for the send/receive digital signals. The wavelength converter includes: optical/electrical signal converters (2A, 2B) that convert input optical signals into electric digital signals; clock generator circuits (4A, 4B) that automatically identify the transmission mode for digital signals and generate phase-synchronized clocks of a specified frequency that match the signal transmission mode; timing regeneration circuits (6A, 6B) that regenerate clock timing for said digital signals based upon the phase-synchronized clocks from the clock generator circuits; and electric/optical converters (3A, 3B) that convert the digital signals from said timing regeneration circuits into optical signals of a specified wavelength.Type: ApplicationFiled: August 30, 2001Publication date: October 31, 2002Inventors: Shinji Sakano, Ryuji Ishii, Yoshinori Yamada
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Patent number: 6433925Abstract: A variable attenuator is inserted into an optical input part and a feedback control is performed so that an optical input to an amplifying optical fiber becomes constant. Further, a control for changing a total optical output and an optical input to the amplifying optical fiber is performed on the basis of channel number information obtained from a supervisory signal. When light to/from an intermediate optical component is detected and the absence of the component is detected, pumping is suppressed, thereby avoiding occurrence of an optical surge at the time of connection of the optical component and a signal indicative of detachment of the optical component is generated.Type: GrantFiled: June 17, 1998Date of Patent: August 13, 2002Assignee: Hitachi, Ltd.Inventors: Shinji Sakano, Ichiro Yokota, Junya Kosaka, Takayuki Suzuki
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Publication number: 20020097460Abstract: To ensure transmission in a flexible optical network system, a digital test signal generation/comparison circuit is incorporated in an electrical signal processing portion of a transponder. The optical network system provides transparent wavelength-division multiplex service regardless of the signal type in client optical signals. Prior to connecting a client optical line to the optical system, a selective insertion unit and a selective extraction unit enable quality assessment of the client optical line.Type: ApplicationFiled: June 28, 2001Publication date: July 25, 2002Inventors: Yoshiaki Ikoma, Masaki Miyagami, Shinji Sakano
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Publication number: 20020094155Abstract: In making use of an add/drop multiplexer for demultiplexing or multiplexing signal light of a few specific wavelengths from signal light subjected to optical wavelength multiplexing, a fiber bragg grating is excellent for enhancing rejection of a leakage of a demultiplexed light, but with respect to a high speed optical signal at the demultiplexing or multiplexing, a waveform deterioration occurs. When a dielectric multilayer film filter is used for dealing with the high speed optical signal, a plurality of filters are used to suppress a coherent cross talk, resulting in an increase of loss of pass-through light and an increase of costs.Type: ApplicationFiled: August 30, 2001Publication date: July 18, 2002Inventor: Shinji Sakano
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Patent number: 6393182Abstract: An optical transmission system having a transmitter which generates an optical signal and amplifies the optical signal, a receiver which receives a transmitted optical signal, and an optical fiber which receives and transmits amplified optical signal from the transmitter to the receiver. The optical fiber is a single-mode optical fiber and has an end face to be optically coupled through physical contact with another optical fiber. A transparent film made of a material having a melting temperature higher than a melting temperature of a material of the single-mode optical fiber is formed on the end face of the single-mode optical fiber.Type: GrantFiled: November 16, 2000Date of Patent: May 21, 2002Assignee: Hitachi, Ltd.Inventor: Shinji Sakano
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Publication number: 20010026384Abstract: A medium-scale IP telecommunications network is configured in a low-cost optical network with good reliability and expandability. A physical configuration example has a center node 2-1 and eight local nodes 2-11 through 2-18 connected in one OADM ring 2-21/2-22. The logical configuration is a star configuration with the central node 2-1 at its origin with all traffic passing through the center node 2-1. The local nodes 2-11 through 2-18 are connected to the central node 2-1 by wavelength-unit optical channels or optical paths &lgr;1 through &lgr;8. Channels are added as required. Initially, for example, the center node 2-1 and the local node 2-5 are connected by &lgr;5, but &lgr;13 can added when the need arises. Since the logical star network is limited to approximately two add/drop optical channels at local nodes, costs are reduced by using inexpensive filters (e.g.Type: ApplicationFiled: March 14, 2001Publication date: October 4, 2001Inventors: Shinji Sakano, Yasushi Sawada, Hideaki Tsushima, Yoshiaki Ikoma
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Patent number: 6297902Abstract: In a light amplification apparatus in which a part of a light output from a light amplification medium is transmitted through a branching means to a light detection means so that light power of the light output is detected by the light detection means whereby at least one of an excitation source and a return means is controlled through a control means so that light branch from a branching means is returned as a return light to the light amplification medium through the branching means again in a state in which light power is adjusted by the return means, and, as a result, the light power of the light output from the light amplification medium can be kept in a desired value while the occurrence of a light surge is suppressed, a light amplification medium control method and a light amplification apparatus wherein a signal light input can be amplified while the occurrence of a light surge is suppressed by a simple structure and with good control response, and a system using the same.Type: GrantFiled: February 18, 1997Date of Patent: October 2, 2001Assignees: Hitachi, Ltd., Nippon Telegraph and Telephone CorporationInventors: Junya Kosaka, Shinji Sakano, Yoshiaki Sato, Kazuo Aida
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Patent number: 6262835Abstract: An optical amplifier controlling method and optical amplifier system which are simple in composition, maintain the S/N ratio of an optical signal output, have high control responsiveness, suppress the generation of a light surge, and amplify the optical signal, and a system using the method and amplifier system. The optical amplifier system includes an optical amplifier unit which is supplied with energy by pumping light and amplifies with the supplied energy an optical signal inputted to the amplifier unit. The optical amplifier system includes a gain control unit for controlling the gain of the amplifier system depending on the strength of the optical signal inputted to the amplifier system such that the amplifier has a maximum gain at a predetermined value of the strength of the optical signal inputted in the optical amplifier system and an area of a positive gain of not more than the maximum gain for a strength of the optical signal of not more than the predetermined value.Type: GrantFiled: May 18, 2000Date of Patent: July 17, 2001Assignee: Hitachi, LTDInventors: Junya Kosaka, Shinji Sakano
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Patent number: 6233091Abstract: An optical amplifier controlling method and optical amplifier system which are simple in composition, maintain the S/N ratio of an optical signal output, have high control responsiveness, suppress the generation of a light surge, and amplify the optical signal, and a system using the method and amplifier system. The optical amplifier system includes an optical amplifier unit which is supplied with energy by pumping light and amplifies with the supplied energy an optical signal inputted to the amplifier unit. The optical amplifier system includes a gain control unit for controlling the gain of the amplifier system depending on the strength of the optical signal inputted to the amplifier system such that the amplifier has a maximum gain at a predetermined value of the strength of the optical signal inputted in the optical amplifier system and an area of a positive gain of not more than the maximum gain for a strength of the optical signal of not more than the predetermined value.Type: GrantFiled: April 3, 2000Date of Patent: May 15, 2001Assignee: Hitachi, Ltd.Inventors: Junya Kosaka, Shinji Sakano
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Patent number: 6173095Abstract: A single-mode optical fiber for outputting high-power light wherein a diameter of a mode field at an output end of the optical fiber is made large to thereby lower a light power density. Material higher in thermal conductivity or melting temperature than material of the optical fiber is coated on the end face of the fiber. A thickness of the coating film is set to cause light wavelength to be phase-shifted by ¼ of the wavelength to reduce reflection at the connecting end face. The same type of optical fiber is used as a party optical fiber to be connected therewith.Type: GrantFiled: May 13, 1999Date of Patent: January 9, 2001Assignee: Hitachi, Ltd.Inventor: Shinji Sakano
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Patent number: 6078422Abstract: An optical amplifier controlling method and optical amplifier system which are simple in composition, maintain the S/N ratio of an optical signal output, have high control responsiveness, suppress the generation of a light surge, and amplify the optical signal, and a system using the method and amplifier system. The optical amplifier system includes an optical amplifier unit which is supplied with energy by pumping light and amplifies with the supplied energy an optical signal inputted to the amplifier unit. The optical amplifier system includes a gain control unit for controlling the gain of the amplifier system depending on the strength of the optical signal inputted to the amplifier system such that the amplifier has a maximum gain at a predetermined value of the strength of the optical signal inputted in the optical amplifier system and an area of a positive gain of not more than the maximum gain for a strength of the optical signal of not more than the predetermined value.Type: GrantFiled: November 25, 1997Date of Patent: June 20, 2000Assignee: Hitachi, Ltd.Inventors: Junya Kosaka, Shinji Sakano