Patents by Inventor Shinji Sogawa

Shinji Sogawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Tungsten sputtering target and method for manufacturing the same
    Patent number: 11939661
    Abstract: According to one of various aspects of the present invention, a tungsten sputtering target has a purity of tungsten is 5 N (99.999% by weight) or more, and an impurity of carbon and an impurity of oxygen contained in tungsten are 50 ppm by weight or less, respectively, and an average grain size of tungsten crystal is more than 100 ?m.
    Type: Grant
    Filed: September 7, 2018
    Date of Patent: March 26, 2024
    Assignee: JX Metals Corporation
    Inventors: Shinji Sogawa, Takafumi Dasai, Seiji Nakasumi
  • Tungsten Sputtering Target And Method For Producing Same
    Publication number: 20200370167
    Abstract: According to one of various aspects of the present invention, a tungsten sputtering target has a purity of tungsten is 5 N (99.999% by weight) or more, and an impurity of carbon and an impurity of oxygen contained in tungsten are 50 ppm by weight or less, respectively, and an average grain size of tungsten crystal is more than 100 ?m.
    Type: Application
    Filed: September 7, 2018
    Publication date: November 26, 2020
    Inventors: Shinji Sogawa, Takafumi Dasai, Seiji Nakasumi