Patents by Inventor Shinji Tadakuma

Shinji Tadakuma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter
    Patent number: 5319216
    Abstract: A substrate detector device comprises a boat or chuck for holding substrates, a light emitting section having a plurality of light emitting elements, arranged side by side, for respectively applying light beams to the substrates, a light receiving section, facing the light emitting section and having a plurality of light receiving elements, for receiving light beams passed through the substrates, the light receiving elements arranged side by side so as not face the light emitting elements, a polarization filter provided on optical axes of the respective optical beams incident on the light receiving elements, a memory for storing, as reference data, an amount of light received by a receiving element which has been measured in advance when a light beam is applied to a substrate in a state where no other substrate is present on either side of the substrate, and controller for discriminating the presence, the number, and the state of arrangement of the substrates on the holding means based on the reference data a
    Type: Grant
    Filed: August 12, 1993
    Date of Patent: June 7, 1994
    Assignees: Tokyo Electron Limited, Tokyo Electron Kyushu Limited
    Inventors: Shori Mokuo, Yoichi Deguchi, Mitsuo Nishi, Shinji Tadakuma