Patents by Inventor Shinji Togawa

Shinji Togawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9181631
    Abstract: Provided is a silicon crystalline material, which is manufactured by a CZ method to be used as a material bar for manufacturing a silicon single crystal by an FZ method and has a grasping section for being loaded in a crystal growing furnace employing the FZ method without requiring mechanical processing. A method for manufacturing such silicon crystalline material is also provided. The silicon crystalline material is manufactured by the silicon crystal manufacturing method employing the CZ method and is provided with the grasping section, which is manufactured in a similar way as a shoulder portion, a straight body portion and a tail portion in a silicon crystal growing step employing the CZ method, and is loaded in a single crystal manufacturing apparatus employing the FZ method to grow single crystals. A seed-crystal used in the silicon crystal manufacture employing the CZ method is used as the grasping section.
    Type: Grant
    Filed: January 23, 2008
    Date of Patent: November 10, 2015
    Assignee: SUMCO TECHXIV CORPORATION
    Inventors: Shinji Togawa, Ryosuke Ueda
  • Patent number: 8382895
    Abstract: A method of manufacturing a silicon monocrystal by FZ method, wherein a P-type or N-type silicon crystal having been pulled up by CZ method is used as a raw material. While impurities whose conductivity type is the same as that of the raw material are supplied by a gas doping method, the raw material is recrystallized by an induction-heating coil for obtaining a product-monocrystal.
    Type: Grant
    Filed: September 27, 2007
    Date of Patent: February 26, 2013
    Assignee: Sumco Techxiv Corporation
    Inventors: Shinji Togawa, Toshiyuki Sato
  • Publication number: 20100116194
    Abstract: Provided is a silicon crystalline material, which is manufactured by a CZ method to be used as a material bar for manufacturing a silicon single crystal by an FZ method and has a grasping section for being loaded in a crystal growing furnace employing the FZ method without requiring mechanical processing. A method for manufacturing such silicon crystalline material is also provided. The silicon crystalline material is manufactured by the silicon crystal manufacturing method employing the CZ method and is provided with the grasping section, which is manufactured in a similar way as a shoulder portion, a straight body portion and a tail portion in a silicon crystal growing step employing the CZ method, and is loaded in a single crystal manufacturing apparatus employing the FZ method to grow single crystals. A seed-crystal used in the silicon crystal manufacture employing the CZ method is used as the grasping section.
    Type: Application
    Filed: January 23, 2008
    Publication date: May 13, 2010
    Applicant: SUMCO TECHXIV CORPORATION
    Inventors: Shinji Togawa, Ryosuke Ueda
  • Publication number: 20090309069
    Abstract: A method of manufacturing a silicon monocrystal by FZ method, wherein a P-type or N-type silicon crystal having been pulled up by CZ method is used as a raw material. While impurities whose conductivity type is the same as that of the raw material are supplied by a gas doping method, the raw material is recrystallized by an induction-heating coil for obtaining a product-monocrystal.
    Type: Application
    Filed: September 27, 2007
    Publication date: December 17, 2009
    Inventors: Shinji Togawa, Toshiyuki Sato
  • Publication number: 20090052352
    Abstract: A method for providing a sound or a moving image from a first apparatus to a second apparatus including allocating sample values belonging to the same first time slot among sample values obtained at individual time points by sampling an analog signal of a sound or a moving image to plural packets in the first apparatus and transmitting the sample-value-allocated packets to the second apparatus from the first apparatus.
    Type: Application
    Filed: July 2, 2008
    Publication date: February 26, 2009
    Applicant: FUJITSU LIMITED
    Inventor: Shinji TOGAWA
  • Publication number: 20060217874
    Abstract: A controller device, after switching a traffic signal displayed on traffic signal equipment from a cross inhibition signal to a non cross inhibition signal, makes the traffic signal equipment display the non cross inhibition signal during a second time period before a second set time passes after a first time period ends to switch from the non cross inhibition signal to the cross inhibition signal responding to end of the second time period, if a detection signal indicating a target person of extension is received from a traverser detecting device during the first time period before a first set time passes after switching from the cross inhibition signal to the non cross inhibition signal. If no detection signal is received during the first time period, the controller device switches from the non cross inhibition signal to the cross inhibition signal responding to end of the first time period.
    Type: Application
    Filed: June 27, 2005
    Publication date: September 28, 2006
    Applicant: FUJITSU LIMITED
    Inventors: Shinya Ueda, Shinji Togawa, Takao Matsuda, Mitsunori Yanagihara
  • Patent number: 6869478
    Abstract: A method for producing a silicon ingot having no defect over a wide range of region with stability and good reproducibility, wherein when a silicon single crystal (11) is pulled up form a silicon melt (13), the shape of a solid-liquid interface (14) which a boundary between the silicon melt (13) and the silicon single crystal (11) and the temperature distribution on the side face (11b) of a single crystal under being pulled up are appropriately controlled.
    Type: Grant
    Filed: March 19, 2001
    Date of Patent: March 22, 2005
    Assignee: Komatsu Denshi Kinzoku Kabushiki Kaisha
    Inventors: Kozo Nakamura, Toshiaki Saishoji, Shinji Togawa, Toshirou Kotooka, Susumu Maeda
  • Publication number: 20030041796
    Abstract: A method for producing a silicon ingot having no defect over a wide range of region with stability and good reproducibility, wherein when a silicon single crystal (11) is pulled up form a silicon melt (13), the shape of a solid-liquid interface (14) which a boundary between the silicon melt (13) and the silicon single crystal (11) and the temperature distribution on the side face (11b) of a single crystal under being pulled up are appropriately controlled.
    Type: Application
    Filed: September 23, 2002
    Publication date: March 6, 2003
    Inventors: Kozo Nakamura, Toshiaki Saishoji, Shinji Togawa, Toshirou Kotooka, Susumu Maeda
  • Patent number: 5704974
    Abstract: When a Si single crystal 8 is pulled up from a melt 6 received in a crucible 2, the state of eddy flows generated in the melt 6 is judged from the temperature distribution of the melt at the surface. According to the result of judgement, the gas, i.e. N.sub.2, Xe or Kr, which causes extraoridnary deviation in the density of a melt 6 is added to an atmospheric gas, so as to keep the eddy flows under unstabilized condition. The effect of said gas is typical in the case of crystal growth from the melt to which a dopant such as Ca, Sb, Al, As or In having the effect to suppress the extraordinary deviation in the density is added. Since the single crystal is pulled up from the melt held in the temperature-controlled condition at the surface, impurity distribution and oxygen distribution are made uniform along the direction of crystal growth. A single crystal obtained in this way has highly-stabilized quality.
    Type: Grant
    Filed: March 22, 1996
    Date of Patent: January 6, 1998
    Assignees: Research Development Corporation of Japan, Sumitomo Sitix Corporation, Toshiba Ceramics Co., Ltd., Nippon Steel Corporation, Komatsu Electronic Metals Co., Ltd., Mitsubishi Materials Corporation
    Inventors: Koji Izunome, Souroku Kawanishi, Shinji Togawa, Atsushi Ikari, Hitoshi Sasaki, Shigeyuki Kimura
  • Patent number: 5700320
    Abstract: When a B or P-doped Si single crystal is pulled up from a B or P-doped melt by the Czochralski method, an element such as Ga, Sb or In having the effect to reduce the heat expansion coefficient of said melt at a temperature near the melting point is added to said melt. The additive element stabilizes the temperature condition of crystal growth so as to control the generation of eddy flows just below the interface of crystal growth.When a Ga or Sb-doped Si single crystal is pulled up from a Ga or Sb-doped melt, an element such as B or P having the effect to increase the heat expansion coefficient of said melt at a temperature near the melting point is added. The agitation of the melt just below the interface of crystal growth is accelerated by the addition of B or P, so as to assure the growth of a Si single crystal from the melt having impurity distribution made uniform along the radial direction.
    Type: Grant
    Filed: March 22, 1996
    Date of Patent: December 23, 1997
    Assignees: Research Development Corporation of Japan, Sumitomo Sitix Corporation, Toshiba Ceramics Co., Ltd., Nippon Steel Corporation, Komatsu Electronic Metals Co., Ltd., Mitsubishi Materials Corporation
    Inventors: Koji Izunome, Souroku Kawanishi, Shinji Togawa, Atsushi Ikari, Hitoshi Sasaki, Shigeyuki Kimura
  • Patent number: 5683504
    Abstract: When a single crystal is pulled up from a melt, the difference .DELTA.T between temperatures at the bottom of a crucible and at the interface of crystal growth is controlled so as to hold the Rayleigh constant defined by the formula of:R a=g.multidot..beta..multidot..DELTA.T.multidot.L/.kappa..multidot..nu.within the range of 5.times.10.sup.5 -4.times.10.sup.7, wherein g represents the acceleration of gravity, .beta. the volumetric expansion coefficient of the melt, L the depth of the melt, .kappa. thermal diffusivity and .nu. the kinematic viscocity. Since the convection mode of the melt at the interface of crystal growth is constantly held in the region of soft turbulence, a single crystal is grown under the stabilized temperature condition without the transfer of the impurity distribution in the melt into the growing single crystal.
    Type: Grant
    Filed: March 22, 1996
    Date of Patent: November 4, 1997
    Assignees: Research Development Corporation of Japan, Sumitomo Sitix Corporation, Toshiba Ceramics Co., Ltd., Nippon Steel Corporation, Komatsu Electronic Metals Co., Ltd., Mitsubishi Materials Corporation
    Inventors: Koji Izunome, Souroku Kawanishi, Shinji Togawa, Atsushi Ikari, Hitoshi Sasaki, Shigeyuki Kimura